scholarly journals Direct measurement of potentials in a reactive ion-plasma etching system

2021 ◽  
pp. 26-32
Author(s):  
Alexander Abramov
Keyword(s):  
Magnetic Field ◽  
Direct Measurement ◽  
Plasma Etching ◽  
Charged Particles ◽  
Plasma Potential ◽  
The Body ◽  
Local Magnetic Field ◽  
Floating Potential ◽  
Ion Plasma ◽  
Etching System

Devices for direct measurement of the plasma potential and floating potential in a gas dis-charge in a reactive ion-plasma etching system are presented. The action of the devices devel-oped for this purpose is based on the creation of a local magnetic field that allows purposeful-ly changing the conditions of ambipolar diffusion of charged particles. This makes it possible to contact the probe with the body of a positive plasma column without the appearance of a floating potential on it. The results of measuring the plasma potential by the proposed and al-ternative methods are compared

Magnetic Field and Geometry Effects on Finding Plasma Potential with a Cylindrical Impedance Probe

2012 ◽  
Author(s):  
David N. Walker ◽  
R. F. Fernsler ◽  
D. D. Blackwell ◽  
W. E. Amatucci
Keyword(s):  
Magnetic Field ◽  
Plasma Potential ◽  
Impedance Probe ◽  
Geometry Effects

scholarly journals 46. The störmertron

1958 ◽  
Vol 6 ◽  
pp. 446-447
Author(s):  
Willard H. Bennett
Keyword(s):  
Magnetic Field ◽  
Charged Particles ◽  
Mercury Vapor ◽  
Electron Gun ◽  
Conducting Film ◽  
New Developments ◽  
Electrically Conducting ◽  
The Earth ◽  
Magnetic Dipole Field ◽  
Glass Tubes

A tube has been developed in which the shapes of streams of charged particles moving in the earth's magnetic field can be produced accurately to scale. The tube has been named the Störmertron in honor of Carl Störmer who calculated many such orbits. New developments which have made this tube possible include a method for coating the inside of large glass tubes with a transparent electrically conducting film, and an electron gun producing gas-focused streams in less than ½ micron of mercury vapor, a nearly vapor-free grease joint, and a nearly vapor-free carbon black. The magnetic dipole field of the earth is simulated with an Alnico magnet capped with properly shaped soft iron caps. The stream is deflected using two pairs of yoke coils near the gun.

scholarly journals Spatial Distributions of Charged Particles and Plasma Potential before and during Beam Extraction in a Negative Hydrogen Ion Source for NBI

2015 ◽  
Vol 10 (0) ◽  
pp. 3405016-3405016 ◽  
Author(s):  
Shaofei GENG ◽  
Katsuyoshi TSUMORI ◽  
Haruhisa NAKANO ◽  
Masashi KISAKI ◽  
Yasuhiko TAKEIRI ◽  
...  
Keyword(s):  
Charged Particles ◽  
Plasma Potential ◽  
Ion Source ◽  
Hydrogen Ion ◽  
Spatial Distributions ◽  
Beam Extraction ◽  
Negative Hydrogen Ion
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