Catalytic Carbon Submicron Fabrication Using Home-Built Very-High Frequency Plasma Enhanced Chemical Vapour Deposition

Sukirno ; Satria Zulkarnaen Bisri; Rasih Yulia Sari; Lilik Hasanah; Mursal ; Ida Usman; Darsikin

doi:10.5614/itbj.sci.2008.40.2.6

Catalytic Carbon Submicron Fabrication Using Home-Built Very-High Frequency Plasma Enhanced Chemical Vapour Deposition

ITB journal of Sciences ◽

10.5614/itbj.sci.2008.40.2.6 ◽

2008 ◽

Vol 40 (2) ◽

pp. 166-181

Author(s):

Sukirno ◽

Satria Zulkarnaen Bisri ◽

Rasih Yulia Sari ◽

Lilik Hasanah ◽

Mursal ◽

...

Keyword(s):

Chemical Vapour Deposition ◽

High Frequency ◽

Vapour Deposition ◽

Chemical Vapour ◽

Very High Frequency ◽

High Frequency Plasma ◽

Frequency Plasma ◽

Very High

Download Full-text

The high deposition of microcrystalline silicon thin film by very high frequency plasma enhanced chemical vapour deposition and the fabrication of solar cells

Chinese Physics B ◽

10.1088/1674-1056/17/9/054 ◽

2008 ◽

Vol 17 (9) ◽

pp. 3464-3470 ◽

Cited By ~ 5

Author(s):

Chen Yong-Sheng ◽

Wang Jian-Hua ◽

Lu Jing-Xiao ◽

Zheng Wen ◽

Gu Jin-Hua ◽

...

Keyword(s):

Thin Film ◽

High Frequency ◽

Vapour Deposition ◽

Chemical Vapour ◽

Microcrystalline Silicon ◽

Silicon Thin Film ◽

Very High Frequency ◽

High Frequency Plasma ◽

Frequency Plasma ◽

Very High

Download Full-text

Low Temperature Carbon Nanotube Fabrication using Very High Frequency-Plasma Enhanced Chemical Vapour Deposition Method

2006 IEEE International Conference on Semiconductor Electronics ◽

10.1109/smelec.2006.381039 ◽

2006 ◽

Author(s):

Sukirno ◽

Satria Zulkarnaen Bisri ◽

Lilik Hasanah ◽

Mursal ◽

Ida Usman ◽

...

Keyword(s):

Carbon Nanotube ◽

High Frequency ◽

Vapour Deposition ◽

Chemical Vapour ◽

Deposition Method ◽

Very High Frequency ◽

High Frequency Plasma ◽

Frequency Plasma ◽

Very High ◽

Chemical Vapour Deposition Method

Download Full-text

Influence of Pressure and Plasma Potential on High Growth Rate Microcrystalline Silicon Grown by Very High Frequency Plasma Enhanced Chemical Vapour Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.45.6166 ◽

2006 ◽

Vol 45 (8A) ◽

pp. 6166-6172 ◽

Cited By ~ 27

Author(s):

A. Gordijn ◽

M. Vanecek ◽

W. J. Goedheer ◽

J. K. Rath ◽

R. E. I. Schropp

Keyword(s):

Vapour Deposition ◽

Chemical Vapour ◽

High Growth ◽

Plasma Potential ◽

High Growth Rate ◽

Microcrystalline Silicon ◽

Very High Frequency ◽

High Frequency Plasma ◽

Frequency Plasma ◽

Very High

Download Full-text

Homojunction and heterojunction silicon solar cells deposited by low temperature–high frequency plasma enhanced chemical vapour deposition

Thin Solid Films ◽

10.1016/s0040-6090(01)01709-6 ◽

2002 ◽

Vol 405 (1-2) ◽

pp. 248-255 ◽

Cited By ~ 22

Author(s):

J. Plá ◽

E. Centurioni ◽

C. Summonte ◽

R. Rizzoli ◽

A. Migliori ◽

...

Keyword(s):

Solar Cells ◽

Low Temperature ◽

Chemical Vapour Deposition ◽

High Frequency ◽

Vapour Deposition ◽

Chemical Vapour ◽

Silicon Solar Cells ◽

High Frequency Plasma ◽

Frequency Plasma

Download Full-text

Ultra-sharp pointed tip Si nanowires produced by very high frequency plasma enhanced chemical vapor deposition via VLS mechanism

Journal of Materials Science ◽

10.1007/s10853-011-5435-6 ◽

2011 ◽

Vol 46 (15) ◽

pp. 5085-5089 ◽

Cited By ~ 11

Author(s):

Habib Hamidinezhad ◽

Yussof Wahab ◽

Zulkafli Othaman

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

High Frequency ◽

Chemical Vapor ◽

Si Nanowires ◽

Very High Frequency ◽

High Frequency Plasma ◽

Frequency Plasma ◽

Very High

Download Full-text

Characterization of High-Rate Deposited Microcrystalline Si Films Prepared Using Atmospheric-Pressure Very High Frequency Plasma

ECS Meeting Abstracts ◽

10.1149/ma2009-02/34/2510 ◽

2009 ◽

Keyword(s):

Atmospheric Pressure ◽

High Frequency ◽

High Rate ◽

Very High Frequency ◽

High Frequency Plasma ◽

Frequency Plasma ◽

Si Films ◽

Very High

Download Full-text

Characteristics of Very High Frequency Plasma Produced Using a Ladder-Shaped Electrode

Japanese Journal of Applied Physics ◽

10.1143/jjap.38.4305 ◽

1999 ◽

Vol 38 (Part 1, No. 7B) ◽

pp. 4305-4308 ◽

Cited By ~ 11

Author(s):

Hiroshi Mashima ◽

Masayoshi Murata ◽

Yoshiaki Takeuchi ◽

Hideo Yamakoshi ◽

Tatsuji Horioka ◽

...

Keyword(s):

High Frequency ◽

Very High Frequency ◽

High Frequency Plasma ◽

Frequency Plasma ◽

Very High

Download Full-text

ERRATA: MICROCRYSTALLINE SILICON FILMS PREPARED BY VERY HIGH FREQUENCY PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION AT LOW TEMPERATURE

International Journal of Modern Physics B ◽

10.1142/s0217979205032310 ◽

2005 ◽

Vol 19 (21) ◽

pp. 3413-3413

Author(s):

ZHIMENG WU ◽

QINGSONG LEI ◽

JIANPING XI ◽

ZHAO YING ◽

XINHUA GENG

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

High Frequency ◽

Chemical Vapor ◽

Microcrystalline Silicon ◽

Very High Frequency ◽

High Frequency Plasma ◽

Frequency Plasma ◽

Very High

Download Full-text

Pulsed very high-frequency plasma-enhanced chemical vapor deposition of silicon films for low-temperature (120 °C) thin film transistors

Journal of Physics D Applied Physics ◽

10.1088/1361-6463/ab9919 ◽

2020 ◽

Vol 53 (41) ◽

pp. 415201

Author(s):

Hiroaki Kakiuchi ◽

Hiromasa Ohmi ◽

Kiyoshi Yasutake

Keyword(s):

Thin Film ◽

Low Temperature ◽

Vapor Deposition ◽

High Frequency ◽

Thin Film Transistors ◽

Chemical Vapor ◽

Very High Frequency ◽

High Frequency Plasma ◽

Frequency Plasma ◽

Very High

Download Full-text

Using optical emission spectroscopy (OES) to monitor In-line very high-frequency plasma enhanced chemical vapor deposition (VHF-PECVD) technique optoelectrical properties

2019 Compound Semiconductor Week (CSW) ◽

10.1109/iciprm.2019.8819292 ◽

2019 ◽

Author(s):

Jia-Yan Lin ◽

Cheng-Yuan Hung ◽

Wei-Chen Tien ◽

Hung-Wei Wu ◽

Yung-Der Juang ◽

...

Keyword(s):

Vapor Deposition ◽

High Frequency ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Chemical Vapor ◽

Optical Emission ◽

Very High Frequency ◽

High Frequency Plasma ◽

Frequency Plasma ◽

Very High

Download Full-text