Surface acoustic wave properties of ZnO films grown by magnetron sputtering

Acta Physica Sinica ◽

10.7498/aps.56.3515 ◽

2007 ◽

Vol 56 (6) ◽

pp. 3515

Author(s):

Yang Guang ◽

Paulo V. Santos

Keyword(s):

Acoustic Wave ◽

Magnetron Sputtering ◽

Surface Acoustic Wave ◽

Zno Films ◽

Wave Properties

Download Full-text

The effects of ZnO films on surface acoustic wave properties of modified lead titanate ceramic substrates

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control ◽

10.1109/tuffc.2005.1563275 ◽

2005 ◽

Vol 52 (12) ◽

pp. 2308-2313 ◽

Author(s):

Sheng-Yuan Chu ◽

Te-Yi Chen ◽

W. Water

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

Lead Titanate ◽

Zno Films ◽

Ceramic Substrates ◽

Wave Properties ◽

Titanate Ceramic

Download Full-text

The Preparation of Piezoelectric ZnO Films by RF Magnetron Sputtering for Layered Surface Acoustic Wave Device Applications

Japanese Journal of Applied Physics ◽

10.1143/jjap.45.3531 ◽

2006 ◽

Vol 45 (4B) ◽

pp. 3531-3536 ◽

Author(s):

Day-Shan Liu ◽

Cheng-Yang Wu ◽

Chia-Sheng Sheu ◽

Fu-Chun Tsai ◽

Cheng-Hsien Li

Keyword(s):

Acoustic Wave ◽

Magnetron Sputtering ◽

Surface Acoustic Wave ◽

Rf Magnetron Sputtering ◽

Zno Films ◽

Surface Acoustic Wave Device ◽

Device Applications ◽

Acoustic Wave Device ◽

Download Full-text

Structural, optical, and surface acoustic wave properties of epitaxial ZnO films grown on (011̄2) sapphire by metalorganic chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.369577 ◽

1999 ◽

Vol 85 (5) ◽

pp. 2595-2602 ◽

Author(s):

C. R. Gorla ◽

N. W. Emanetoglu ◽

S. Liang ◽

W. E. Mayo ◽

Y. Lu ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Acoustic Wave ◽

Surface Acoustic Wave ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Zno Films ◽

Wave Properties ◽

Metalorganic Chemical

Download Full-text

Effects of Mn-doping on surface acoustic wave properties of ZnO films

physica status solidi (RRL) - Rapid Research Letters ◽

10.1002/pssr.201206381 ◽

2012 ◽

Vol 6 (11) ◽

pp. 436-438 ◽

Author(s):

J. T. Luo ◽

P. Fan ◽

F. Pan ◽

F. Zeng ◽

D. P. Zhang ◽

...

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

Zno Films ◽

Mn Doping ◽

Wave Properties

Download Full-text

Surface acoustic wave properties of ZnO films on

IEEE 1992 Ultrasonics Symposium Proceedings ◽

10.1109/ultsym.1992.275971 ◽

2003 ◽

Author(s):

Y. Kim ◽

W.D. Hunt ◽

F.S. Hickernell ◽

R.J. Higgins

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

Zno Films ◽

Wave Properties

Download Full-text

Surface acoustic wave properties of ZnO films on {001}‐cut 〈110〉‐propagating GaAs substrates

Journal of Applied Physics ◽

10.1063/1.356639 ◽

1994 ◽

Vol 75 (11) ◽

pp. 7299-7303 ◽

Author(s):

Yoonkee Kim ◽

William D. Hunt ◽

Frederick S. Hickernell ◽

Robert J. Higgins

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

Zno Films ◽

Gaas Substrates ◽

Wave Properties

Download Full-text

Growth of ZnO films on GaAs substrates with a SiO2 buffer layer by RF planar magnetron sputtering for surface acoustic wave applications

Journal of Crystal Growth ◽

10.1016/0022-0248(94)90968-7 ◽

1994 ◽

Vol 137 (3-4) ◽

pp. 319-325 ◽

Author(s):

Wen-Ching Shih ◽

Mu-Shiang Wu

Keyword(s):

Acoustic Wave ◽

Magnetron Sputtering ◽

Buffer Layer ◽

Surface Acoustic Wave ◽

Zno Films ◽

Gaas Substrates ◽

Planar Magnetron

Download Full-text

Investigation of the surface acoustic wave properties of heteroepitaxial ZnO layers on Al2O3

Journal of Applied Physics ◽

10.1063/1.1661779 ◽

1972 ◽

Vol 43 (9) ◽

pp. 3627-3631 ◽

Author(s):

Frank Pizzarello

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

Wave Properties

Download Full-text

Effect of Metal Electrodes on Surface Acoustic Wave Properties in Bulk Z-Cut GaN Crystal

IEEE Transactions on Electron Devices ◽

10.1109/ted.2014.2337959 ◽

2014 ◽

Vol 61 (10) ◽

pp. 3395-3398 ◽

Author(s):

Waldemar Soluch ◽

Ernest Brzozowski

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

Metal Electrodes ◽

Gan Crystal ◽

Wave Properties

Download Full-text

Comparative Studies on Electronic Structures and Surface Acoustic Wave Properties of (Ca, Sr, Pb)3Ga2Ge3O14 Piezoelectric Crystals

Applied Physics Research ◽

10.5539/apr.v6n3p90 ◽

2014 ◽

Vol 6 (3) ◽

Author(s):

Wenqi Huang ◽

Hong Yang

Keyword(s):

Acoustic Wave ◽

Surface Acoustic Wave ◽

Comparative Studies ◽

Electronic Structures ◽

Piezoelectric Crystals ◽

Wave Properties

Download Full-text