Growth of ZnO films on GaAs substrates with a SiO2 buffer layer by RF planar magnetron sputtering for surface acoustic wave applications

1994 ◽  
Vol 137 (3-4) ◽  
pp. 319-325 ◽  
Author(s):  
Wen-Ching Shih ◽  
Mu-Shiang Wu
Keyword(s):  
Acoustic Wave ◽  
Magnetron Sputtering ◽  
Buffer Layer ◽  
Surface Acoustic Wave ◽  
Zno Films ◽  
Gaas Substrates ◽  
Planar Magnetron

Surface acoustic wave properties of ZnO films on {001}‐cut 〈110〉‐propagating GaAs substrates

1994 ◽  
Vol 75 (11) ◽  
pp. 7299-7303 ◽  
Author(s):  
Yoonkee Kim ◽  
William D. Hunt ◽  
Frederick S. Hickernell ◽  
Robert J. Higgins
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Zno Films ◽  
Gaas Substrates ◽  
Wave Properties

Al-doped ZnO films deposited on a slightly reduced buffer layer by reactive dc unbalanced magnetron sputtering

2014 ◽  
Vol 555 ◽  
pp. 93-99 ◽  
Author(s):  
Minehide Kusayanagi ◽  
Azusa Uchida ◽  
Nobuto Oka ◽  
Junjun Jia ◽  
Shin-ichi Nakamura ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Buffer Layer ◽  
Zno Films ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron ◽  
Doped Zno

Characterization of undoped and Cu-doped ZnO films for surface acoustic wave applications

2001 ◽  
Vol 398-399 ◽  
pp. 641-646 ◽  
Author(s):  
Jin-Bock Lee ◽  
Hye-Jung Lee ◽  
Soo-Hyung Seo ◽  
Jin-Seok Park
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Zno Films ◽  
Doped Zno

Love mode surface acoustic wave ultraviolet sensor using ZnO films deposited on 36° Y-cut LiTaO3

2013 ◽  
Vol 193 ◽  
pp. 87-94 ◽  
Author(s):  
Hua-Feng Pang ◽  
Yong-Qing Fu ◽  
Zhi-Jie Li ◽  
Yifan Li ◽  
Jin-Yi Ma ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Zno Films ◽  
Ultraviolet Sensor
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