scholarly journals Infrared Spectroscopic Study on Deposition Process of the Amorphous Carbon Film with Benzene Molecule as a Source in Plasma Enhanced Chemical Vapor Deposition

2014 ◽  
Author(s):  
Masanori Shinohara ◽  
Yujiro Taniguchi ◽  
Yuya Takaki ◽  
Shohei Yagi ◽  
Yoshinobu Matsuda ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Spectroscopic Study ◽  
Amorphous Carbon ◽  
Vapor Deposition ◽  
Carbon Film ◽  
Chemical Vapor ◽  
Deposition Process ◽  
Benzene Molecule ◽  
Infrared Spectroscopic Study ◽  
Amorphous Carbon Film

Diamond Nucleation During Biased Chemical Vapor Deposition

1992 ◽  
Vol 280 ◽  
Author(s):  
Roseann Csencsits ◽  
Janet Rankin ◽  
Rachel E. Boekenhauer ◽  
Michael K. Kundmann ◽  
Brian W. Sheldon
Keyword(s):  
Chemical Vapor Deposition ◽  
Amorphous Carbon ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Carbon Film ◽  
Chemical Vapor ◽  
Amorphous Film ◽  
Amorphous Layer ◽  
Carbon Layer ◽  
Diamond Nucleation

ABSTRACTThe initial stages of bias-enhanced chemical vapor deposition (CVD) of diamond were investigated in a microwave-plasma system. Samples were characterized with TEM and concurrent electron energy loss spectroscopy (EELS) to characterize chemical bonding in the deposited material. The results show that a thin amorphous carbon film is deposited during biasing, and that diamond nucleation occurs on this amorphous film. Isolated regions of crystalline SiC within the amorphous layer were also observed at longer bias times. These regions apparently form by a reaction between the amorphous carbon layer and the silicon substrate.

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