Growth mechanism of zinc oxide thin film by mist chemical vapor deposition via the modulation of [H2O]/[Zn] ratios

Applied Physics Express ◽

10.7567/1882-0786/ab2134 ◽

2019 ◽

Vol 12 (6) ◽

pp. 065505 ◽

Author(s):

Phimolphan Rutthongjan ◽

Misaki Nishi ◽

Li Liu ◽

Shota Sato ◽

Yuya Okada ◽

...

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

Growth Mechanism ◽

Vapor Deposition ◽

Chemical Vapor ◽

Oxide Thin Film ◽

Zinc Oxide Thin Film

Download Full-text

Zinc oxide thin film synthesized by combustion chemical vapor deposition

Applied Surface Science ◽

10.1016/j.apsusc.2008.08.027 ◽

2008 ◽

Vol 255 (5) ◽

pp. 2859-2863 ◽

Author(s):

Zhi-Yang Li ◽

Fuchun Xu ◽

Qi-Hui Wu ◽

Jing Li

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Oxide Thin Film ◽

Zinc Oxide Thin Film

Download Full-text

Study the Effect of Annealing Temperature on Optical and Structural Properties of Zinc Oxide Thin Film Prepared by Thermal Chemical Vapor Deposition

10.1063/1.3160236 ◽

2009 ◽

Author(s):

R. Adawiah ◽

H. A. Rafaie ◽

M. Rusop ◽

Mohamad Rusop ◽

Tetsuo Soga

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

Structural Properties ◽

Vapor Deposition ◽

Annealing Temperature ◽

Chemical Vapor ◽

Oxide Thin Film ◽

Zinc Oxide Thin Film ◽

Thermal Chemical Vapor Deposition

Download Full-text

Effect of Hydrogen in Zinc Oxide Thin-Film Transistor Grown by Metal Organic Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.46.2493 ◽

2007 ◽

Vol 46 (4B) ◽

pp. 2493-2495 ◽

Author(s):

Jungyol Jo ◽

Ogweon Seo ◽

Euihyuk Jeong ◽

Hyunseok Seo ◽

Byeongon Lee ◽

...

Keyword(s):

Thin Film ◽

Vapor Deposition ◽

Thin Film Transistor ◽

Chemical Vapor ◽

Oxide Thin Film ◽

Organic Chemical ◽

Zinc Oxide Thin Film ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Download Full-text

Fabrication of Flexible Amorphous Indium-Gallium-Zinc-Oxide Thin-Film Transistors by a Chemical Vapor Deposition-Free Process on Polyethylene Napthalate

ECS Journal of Solid State Science and Technology ◽

10.1149/2.007409jss ◽

2014 ◽

Vol 3 (9) ◽

pp. Q3035-Q3039 ◽

Author(s):

Hua Xu ◽

Jiawei Pang ◽

Miao Xu ◽

Min Li ◽

Ying Guo ◽

...

Keyword(s):

Thin Film ◽

Vapor Deposition ◽

Thin Film Transistors ◽

Chemical Vapor ◽

Oxide Thin Film ◽

Indium Gallium Zinc Oxide ◽

Zinc Oxide Thin Film ◽

Free Process ◽

Download Full-text

Growth mechanism of Zinc Oxide thin film by mist-CVD via the modulation of [H2O]/[Zn] ratios

10.7567/ssdm.2019.ps-10-05 ◽

2019 ◽

Author(s):

P. Rutthongjan ◽

M. Nishi ◽

L. Liu ◽

S. Sato ◽

G.T. Dang ◽

...

Keyword(s):

Thin Film ◽

Growth Mechanism ◽

Oxide Thin Film ◽

Zinc Oxide Thin Film

Download Full-text

Effect of bipolar pulsed dc bias on the mechanical properties of silicon oxide thin film by plasma enhanced chemical vapor deposition

Current Applied Physics ◽

10.1016/j.cap.2011.02.005 ◽

2011 ◽

Vol 11 (4) ◽

pp. 1107-1110 ◽

Author(s):

Su B. Jin ◽

Sung I. Kim ◽

Yoon S. Choi ◽

In S. Choi ◽

Jeon G. Han

Keyword(s):

Thin Film ◽

Mechanical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Silicon Oxide ◽

Chemical Vapor ◽

Oxide Thin Film ◽

Pulsed Dc ◽

Download Full-text

Cobalt oxide thin film low pressure metal-organic chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2014.07.029 ◽

2014 ◽

Vol 567 ◽

pp. 8-13 ◽

Author(s):

Stefan Schmid ◽

René Hausbrand ◽

Wolfram Jaegermann

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

Cobalt Oxide ◽

Vapor Deposition ◽

Chemical Vapor ◽

Low Pressure ◽

Oxide Thin Film ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Download Full-text

Microstructure and Electrical Properties of Tantalum Oxide Thin Film Prepared by Electron Cyclotron Resonance Plasma-Enhanced Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.33.6691 ◽

1994 ◽

Vol 33 (Part 1, No. 12A) ◽

pp. 6691-6698 ◽

Author(s):

Il Kim ◽

Sung-Duck Ahn ◽

Bok-Won Cho ◽

Sung-Tae Ahn ◽

Jeong Yong Lee ◽

...

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

Electrical Properties ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Tantalum Oxide ◽

Chemical Vapor ◽

Oxide Thin Film ◽

Resonance Plasma

Download Full-text

Growth Mechanism of YBa2Cu3O7-y Thin Film by Metal-Organic Chemical Vapor Deposition Using VLS Growth Mode

Advances in Superconductivity XII ◽

10.1007/978-4-431-66877-0_293 ◽

2000 ◽

pp. 981-983 ◽

Author(s):

Yutaka Yoshida ◽

Masato Hasegawa ◽

Kouichi Gotou ◽

Seok Beom Kim ◽

Izumi Hirabayashi ◽

...

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

Growth Mechanism ◽

Vapor Deposition ◽

Chemical Vapor ◽

Growth Mode ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Download Full-text

β-Ga 2 O 3 versus ε-Ga 2 O 3 : Control of the crystal phase composition of gallium oxide thin film prepared by metal-organic chemical vapor deposition

Applied Surface Science ◽

10.1016/j.apsusc.2017.05.241 ◽

2017 ◽

Vol 420 ◽

pp. 802-807 ◽

Author(s):

Yi Zhuo ◽

Zimin Chen ◽

Wenbin Tu ◽

Xuejin Ma ◽

Yanli Pei ◽

...

Keyword(s):

Thin Film ◽

Phase Composition ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Gallium Oxide ◽

Chemical Vapor ◽

Oxide Thin Film ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Download Full-text