Residual Clamping Force and Dynamic Random Access Memory Data Retention Improved by Gate Tungsten Etch Dechucking Condition in a Bipolar Electrostatic Chuck

2012 ◽  
Vol 51 (8R) ◽  
pp. 086502 ◽  
Author(s):  
Chung-Yuan Lee ◽  
Chao-Sung Lai ◽  
Chia-Ming Yang ◽  
David HL Wang ◽  
Betty Lin ◽  
...  
Keyword(s):  
Random Access ◽  
Random Access Memory ◽  
Dynamic Random Access Memory ◽  
Clamping Force ◽  
Data Retention ◽  
Access Memory

Statistical modeling of dynamic random access memory data retention characteristics

1996 ◽  
Vol 80 (5) ◽  
pp. 3091-3099 ◽  
Author(s):  
A. Hiraiwa ◽  
M. Ogasawara ◽  
N. Natsuaki ◽  
Y. Itoh ◽  
H. Iwai
Keyword(s):  
Statistical Modeling ◽  
Random Access ◽  
Random Access Memory ◽  
Dynamic Random Access Memory ◽  
Data Retention ◽  
Access Memory ◽  
Retention Characteristics

Statistical analysis of dynamic-random-access-memory data-retention characteristics

1997 ◽  
Author(s):  
Atsushi Hiraiwa ◽  
Makoto Ogasawara ◽  
Nobuyoshi Natsuaki ◽  
Yutaka Itoh ◽  
Hidetoshi Iwai
Keyword(s):  
Statistical Analysis ◽  
Random Access ◽  
Random Access Memory ◽  
Dynamic Random Access Memory ◽  
Data Retention ◽  
Access Memory ◽  
Retention Characteristics

Sub-6F2 Charge Trap Dynamic Random Access Memory Using a Novel Operation Scheme

2006 ◽  
Author(s):  
Zongliang Huo ◽  
Seungjae Baik ◽  
Shieun Kim ◽  
In-seok Yeo ◽  
U-in Chung ◽  
...  
Keyword(s):  
Random Access ◽  
Random Access Memory ◽  
Dynamic Random Access Memory ◽  
Access Memory ◽  
Charge Trap
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