Impacts of Surface Roughness Reduction in (110) Si Substrates Fabricated by High-Temperature Annealing on Electron Mobility in n-Channel Metal–Oxide–Semiconductor Field-Effect Transistors on (110) Si

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Noriyuki Taoka ◽  
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Aivars Lelis ◽  
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pp. 102103 ◽  
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S. T. Chang ◽  
C. W. Liu

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