Impacts of Surface Roughness Reduction in (110) Si Substrates Fabricated by High-Temperature Annealing on Electron Mobility in n-Channel Metal–Oxide–Semiconductor Field-Effect Transistors on (110) Si
2013 ◽
Vol 52
(4S)
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pp. 04CC26
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2007 ◽
Vol 46
(4B)
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pp. 1921-1928
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2001 ◽
Vol 188
(1)
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pp. 219-222
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2013 ◽
Vol 12
(4)
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pp. 621-628
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