spectroscopic ellipsometer
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Analysis of Paraffin Thin Film by Spectroscopic Ellipsometer

2021 ◽  
Vol 141 (4) ◽  
pp. 572-573
Author(s):  
Hiroshi Kumagai ◽  
Riho Iida ◽  
Tomohiro Kosuge ◽  
Takanobu Sato ◽  
Michio Suzuki ◽  
...  
Keyword(s):  
Thin Film ◽  
Spectroscopic Ellipsometer

scholarly journals Design and Manufacture of a Microfluidic Cell To Be Used With a Spectroscopic Ellipsometer

2021 ◽  
Vol 4 (1) ◽  
pp. 28-31
Author(s):  
Tamás Bíró ◽  
József Bálint Renkó
Keyword(s):  
Surface Treatment ◽  
Development Process ◽  
Material Testing ◽  
Thin Layers ◽  
Manufacturing Processes ◽  
Structure Development ◽  
Spectroscopic Ellipsometer ◽  
Physical Background ◽  
Design And Manufacture ◽  
Layer Development

Abstract In material testing and manufacturing processes, creating thin layers is a widely used method for structure development or for surface treatment purposes. Despite its widespread use, the physical background of the layer development process is currently under-researched. Its examination requires the development of procedures and tools that, in combination with the existing tools, can help to understand these processes. The development of microfluidic cells is a way to solve this problem. In this paper, a newly developed microfluidic cell is presented, which also offers a solution to several problems encountered when using previous designs.

A Wide-Range Spectroscopic Ellipsometer with Switching of Orthogonal Polarization States Based on the MDR-41 Monochromator

2019 ◽  
Vol 62 (6) ◽  
pp. 813-816
Author(s):  
V. I. Kovalev ◽  
V. V. Kovalev ◽  
A. I. Rukovishnikov ◽  
S. V. Kovalev ◽  
S. U. Uvaysov
Keyword(s):  
Orthogonal Polarization ◽  
Spectroscopic Ellipsometer ◽  
Wide Range ◽  
Polarization States
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