Design and Manufacture of a Microfluidic Cell To Be Used With a Spectroscopic Ellipsometer
Keyword(s):
Abstract In material testing and manufacturing processes, creating thin layers is a widely used method for structure development or for surface treatment purposes. Despite its widespread use, the physical background of the layer development process is currently under-researched. Its examination requires the development of procedures and tools that, in combination with the existing tools, can help to understand these processes. The development of microfluidic cells is a way to solve this problem. In this paper, a newly developed microfluidic cell is presented, which also offers a solution to several problems encountered when using previous designs.
2018 ◽
Vol 26
(42)
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pp. 165-170
2014 ◽
Vol 14
(4)
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pp. 783-794
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Keyword(s):
2012 ◽
Vol 220-223
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pp. 2319-2322