cathode luminescence
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2021 ◽  
Vol 104 (3) ◽  
Author(s):  
Yoshinori Uemura ◽  
Masaru Irita ◽  
Yoshikazu Homma ◽  
Mark Sadgrove


2021 ◽  
Vol 60 (3) ◽  
pp. 031001
Author(s):  
Kazuyoshi Nakada ◽  
Takahito Nishimura ◽  
Naoki Suyama ◽  
Akira Yamada


2016 ◽  
Vol 8 (3) ◽  
pp. 313-321 ◽  
Author(s):  
Hosam A. Othman ◽  
Hagar S. Elkholy ◽  
Ibrahim Z. Hager


2016 ◽  
Vol 858 ◽  
pp. 449-452
Author(s):  
Yuji Kiuchi ◽  
Hidenori Kitai ◽  
Hiromu Shiomi ◽  
Masatoshi Tsujimura ◽  
Daisuke Nakata ◽  
...  

Wet and N2O oxidized SiO2/SiC for C-face substrates were comprehensively investigated to clarify the origin of oxide defects which affect channel mobility and threshold voltage stability by using leakage-current analysis. The estimated defects are identified by cathode luminescence, X-ray photoelectron spectroscopy, and high-resolution Rutherford backscattering spectroscopy. The origin of the observed oxide defects might be complex defect of O vacancy defects and/or C related defects including N.



2015 ◽  
Vol 168 ◽  
pp. 288-292 ◽  
Author(s):  
J.W. Lee ◽  
Yoon Shon ◽  
N.G. Subramaniam ◽  
Y.H. Kwon ◽  
T.W. Kang ◽  
...  
Keyword(s):  


2014 ◽  
Vol 57 (9) ◽  
pp. 1684-1688
Author(s):  
Fang Liu ◽  
XiaoPing Ouyang ◽  
Bin Liu ◽  
JinLiang Liu ◽  
Liang Chen ◽  
...  




2014 ◽  
Vol 8 (1) ◽  
pp. 121-127 ◽  
Author(s):  
Koji Koyama ◽  
◽  
Hideo Aida ◽  
Michio Uneda ◽  
Hidetoshi Takeda ◽  
...  

Difficulties involved in producing Double-Side Polished (DSP) GaN substrate are extracted and approaches to overcoming them are reported in this paper. Mechanical polishing with a neutral diamond slurry of pH 7.0 for the N-face and CMP for the Ga-face are widely applied to obtain DSP GaN substrates. Accordingly, the substrate exhibits transparency. However, this is accompanied by approximately 100 µm of bowing due to the Twyman effect. In this paper, the reduction of the substrate bowing to 10 µm is successfully achieved through the use of an acidic diamond slurry with a pH of 1.8 instead of a neutral slurry. Cathode luminescence reveals that an acidic diamond slurry also induces less subsurface damage in the N-face than does the neutral one. We conclude that the stress on the N-face induced by the subsurface damage in the case of polishing with an acidic diamond slurry comes closer to that of the Gaface finished via CMP.



Author(s):  
Chiyu Morita ◽  
Yuriko Masuda ◽  
Yasunori Nawa ◽  
Aki Miyake ◽  
Wataru Inami ◽  
...  


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