micro fabrication technology
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Nanoscale ◽  
2021 ◽  
Author(s):  
Yuhang Sheng ◽  
Cihui Liu ◽  
Liyan Yu ◽  
Yunyi Yang ◽  
Fengrui Hu ◽  
...  

Direct laser writing (DLW) is a mask-free and cost-efficient micro-fabrication technology, which has been explored to pattern structures on perovskites. However, there is still a lack of research on DLW...


Sensors ◽  
2020 ◽  
Vol 20 (14) ◽  
pp. 4024 ◽  
Author(s):  
Alok Kumar ◽  
Cong Wang ◽  
Fan-Yi Meng ◽  
Zhong-Liang Zhou ◽  
Meng Zhao ◽  
...  

This article presents a high-sensitivity, quantified, linear, and mediator-free resonator-based microwave biosensor for glucose sensing application. The proposed biosensor comprises an air-bridge-type asymmetrical differential inductor (L) and a center-loaded circular finger-based inter-digital capacitor (C) fabricated on Gallium Arsenide (GaAs) substrate using advanced micro-fabrication technology. The intertwined asymmetrical differential inductor is used to achieve a high inductance value with a suitable Q-factor, and the centralized inter-digital capacitor is introduced to generate an intensified electric field. The designed microwave sensor is optimized to operate at a low resonating frequency that increases the electric field penetration depth and interaction area in the glucose sample. The microwave biosensor is tested with different glucose concentrations (0.3–5 mg/ml), under different ambient temperatures (10–50 °C). The involvement of advanced micro-fabrication technology effectively miniaturized the microwave biosensor (0.006λ0 × 0.005λ0) and enhanced its filling factor. The proposed microwave biosensor demonstrates a high sensitivity of 117.5 MHz/mgmL-1 with a linear response (r2 = 0.9987), good amplitude variation of 0.49 dB/mgmL-1 with a linear response (r2 = 0.9954), and maximum reproducibility of 0.78% at 2 mg/mL. Additionally, mathematical modelling was performed to estimate the dielectric value of the frequency-dependent glucose sample. The measured and analyzed results indicate that the proposed biosensor is suitable for real-time blood glucose detection measurements.


2003 ◽  
Vol 123 (12) ◽  
pp. 560-564 ◽  
Author(s):  
Masaaki Ichiki ◽  
Jiunn-Jye Tsaur ◽  
Lulu Zhang ◽  
Zhang-Jie Wang ◽  
Ryutaro Maeda

2003 ◽  
Vol 43 (supplement) ◽  
pp. S118
Author(s):  
K. Atsuta ◽  
H. Noji ◽  
S. Takeuchi

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