Evaluation of titanium silicon nitride as gate electrodes for complementary metal-oxide semiconductor
2002 ◽
Vol 20
(4)
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pp. 1406
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2007 ◽
Vol 25
(4)
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pp. 1265
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1999 ◽
Vol 17
(4)
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pp. 1340-1351
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2004 ◽
Vol 22
(1)
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pp. 175
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