Highly Sensitive Capacitive Pressure Sensors over a Wide Pressure Range Enabled by the Hybrid Responses of a Highly Porous Nanocomposite

2021 ◽  
pp. 2103320
Author(s):  
Kyoung‐Ho Ha ◽  
Weiyi Zhang ◽  
Hongwoo Jang ◽  
Seungmin Kang ◽  
Liu Wang ◽  
...  
Vacuum ◽  
2017 ◽  
Vol 145 ◽  
pp. 123-127 ◽  
Author(s):  
Yanwu Li ◽  
Yongjun Cheng ◽  
Wenjun Sun ◽  
Yongjun Wang ◽  
Meng Dong ◽  
...  

Adsorption ◽  
2015 ◽  
Vol 21 (1-2) ◽  
pp. 53-65 ◽  
Author(s):  
Yongchen Song ◽  
Wanli Xing ◽  
Yi Zhang ◽  
Weiwei Jian ◽  
Zhaoyan Liu ◽  
...  

2013 ◽  
Vol 313-314 ◽  
pp. 666-670 ◽  
Author(s):  
K.J. Suja ◽  
Bhanu Pratap Chaudhary ◽  
Rama Komaragiri

MEMS (Micro Electro Mechanical System) are usually defined as highly miniaturized devices combining both electrical and mechanical components that are fabricated using integrated circuit batch processing techniques. Pressure sensors are usually manufactured using square or circular diaphragms of constant thickness in the order of few microns. In this work, a comparison between circular diaphragm and square diaphragm indicates that square diaphragm has better perspectives. A new method for designing diaphragm of the Piezoresistive pressure sensor for linearity over a wide pressure range (approximately double) is designed, simulated and compared with existing single diaphragm design with respect to diaphragm deflection and sensor output voltage.


1991 ◽  
Vol 46 (5) ◽  
pp. 653-661 ◽  
Author(s):  
Andreas Eggert ◽  
Erwin Riedel

FeCr2O4 has been prepared under CO-CO2-atmosphere with oxygen partial pressures between 10-18 and 10-8 bar. X-Ray and Mößbauer investigations show that under higher pressures FeCr2O4 is not stoichiometric but contains Fe(III), and that corund type Cr2O3 as an additional phase has been formed. In the wide pressure range from 10-17 to 10-14 bar the contents of Fe(III) are lower than 1% of total iron, and the corund phase is negligible.


2020 ◽  
Vol 12 (14) ◽  
pp. 16691-16699 ◽  
Author(s):  
Han Byul Choi ◽  
Jinwon Oh ◽  
Youngsoo Kim ◽  
Mikhail Pyatykh ◽  
Jun Chang Yang ◽  
...  

2020 ◽  
Vol 91 (11) ◽  
pp. 113501
Author(s):  
Ante Hecimovic ◽  
Federico D’Isa ◽  
Emile Carbone ◽  
Aleksander Drenik ◽  
Ursel Fantz

2020 ◽  
Vol 132 (50) ◽  
pp. 22991-22991
Author(s):  
Dae Won Kim ◽  
Dong Won Kang ◽  
Minjung Kang ◽  
Jung‐Hoon Lee ◽  
Jong Hyeak Choe ◽  
...  

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