Passive Particle Jamming Variable Stiffness Material‐Based Flexible Capacitive Stress Sensor with High Sensitivity and Large Measurement Limit

2021 ◽  
pp. 2100106
Author(s):  
Dongguang Zhang ◽  
Xinxin Wang ◽  
Yali Wu ◽  
Honglie Song ◽  
Zhen Ma ◽  
...  
Micromachines ◽  
2019 ◽  
Vol 10 (11) ◽  
pp. 730 ◽  
Author(s):  
Xiaozhou Lü ◽  
Liang Qi ◽  
Hanlun Hu ◽  
Xiaoping Li ◽  
Guanghui Bai ◽  
...  

Flexible tactile sensor can be integrated into artificial skin and applied in industrial robot and biomedical engineering. However, the presented tactile sensors still have challenge in increasing sensitivity to expand the sensor’s application. Aiming at this problem, this paper presents an ultra-sensitive flexible tactile sensor. The sensor is based on piezoresistive effect of graphene film and is composed of upper substrate (PDMS bump with a size of 5 mm × 7 mm and a thickness of 1 mm), medial Graphene/PET film (Graphene/PET film with a size of 5 mm × 7 mm, PET with a hardness of 2H) and lower substrate (PI with fabricated electrodes). We presented the structure and reduced the principle of the sensor. We also fabricated several sample devices of the sensor and carried out experiment to test the performance. The results show that the sensor performed an ultra high sensitivity of 10.80/kPa at the range of 0–4 kPa and have a large measurement range up to 600 kPa. The sensor has 4 orders of magnitude between minimum resolution and maximum measurement range which have great advantage compared with state of the art. The sensor is expected to have great application prospect in robot and biomedical.


Author(s):  
Junjie Zhang ◽  
Qiangzhi Fu ◽  
Lei Song ◽  
Bian Wu

Author(s):  
Ahsan Mian ◽  
Jesse Law

In the current investigation, the piezoresistive effect in a van der Pauw (VDP) stress sensor subjected to biaxial stress was considered. The VDP resistance equations were combined with the silicon piezoresistivity equations to yield relations for the change in resistance of a VDP sensor in terms of the applied state of stress. Then the sensitivity of the VDP sensor to biaxial stress was determined analytically and simulated numerically. The biaxial stress states considered were those for a circular diaphragm under pressure. The numerical calculations involved the use of anisotropic conduction based simulations, implemented in MATLAB using the finite difference technique. The VDP sensitivities to biaxial stress were compared to the sensitivity for the conventional piezoresistive stress sensor. It is observed that the theoretical (based on analytical and numerical results)pressure sensitivity of the new VDP sensor is about three times greater than the conventional counterpart. Analysis was performed for both p-type and n-type Silicon. It is determined that the angle of the VDP sensor with respect to the Silicon crystallographic axes can and should be optimized, depending on Silicon dopant, and the optimum orientation angles are determined.


Author(s):  
Chen Du ◽  
Yong Zhang ◽  
Dongzhi Zhang ◽  
Bao Zhang ◽  
Wenhao Zhao

Flexible wearable sensors have attracted a lot of attention because of their great potential for applications in wearable medical health detection, human activity detection, and artificial electronic skin. However, achieving...


Sign in / Sign up

Export Citation Format

Share Document