Engineered Microstructure Derived Hierarchical Deformation of Flexible Pressure Sensor Induces a Supersensitive Piezoresistive Property in Broad Pressure Range

A high-sensitivity and high-transmittance flexible pressure sensor is presented in this paper. Using polydimethylsiloxane (PDMS) sensing film to cover indium tin oxide (ITO) electrodes interdigitated on the polyethylene terephthalate (PET) substrate, an interdigital capacitance (IDC) structure is constructed. The pressure and proximity sensing characteristics of the fabricated IDC sensor are investigated. The experiment results show that the IDC sensor has the piecewise linear function in different pressure range, especially sensitive to the low-pressure range with the pressure sensitivity of 6.64 kPa[Formula: see text]. Moreover, it has a good repeatability with the maximum error rate of 2.73% and a high transmittance over 90% in the wavelength range from 400 nm to 800 nm. As a human finger approaches or leaves, the proximity sensing characteristic emerges, with a maximum sensing distance of about 20 cm.

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Cost-Efficient Formation of Flexible Pressure Sensor with Micropillar Arrays by Metal-Assisted Chemical Etching for Wearable Electronic Skin

2018 IEEE 68th Electronic Components and Technology Conference (ECTC) ◽

10.1109/ectc.2018.00122 ◽

2018 ◽

Author(s):

Yougen Hu ◽

Xinyu Zhang ◽

Pengli Zhu ◽

Tao Zhao ◽

Yuan Zhang ◽

...

Keyword(s):

Pressure Sensor ◽

Chemical Etching ◽

Electronic Skin ◽

Wearable Electronic ◽

Metal Assisted Chemical Etching ◽

Cost Efficient ◽

Flexible Pressure Sensor ◽

Micropillar Arrays

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Design simulation and analysis of piezoresistive micro pressure sensor for pressure range of 0 to 1MPa

2016 International Conference on Electrical, Electronics, Communication, Computer and Optimization Techniques (ICEECCOT) ◽

10.1109/iceeccot.2016.7955243 ◽

2016 ◽

Cited By ~ 4

Author(s):

Kirankumar B. Balavalad ◽

B. G. Sheeparamatti

Keyword(s):

Pressure Sensor ◽

Pressure Range

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Pressure Sensing Fabric

MRS Proceedings ◽

10.1557/proc-0920-s05-05 ◽

2006 ◽

Vol 920 ◽

Cited By ~ 7

Author(s):

Zhang Hui ◽

Tao Xiao Ming ◽

Yu Tong Xi ◽

Li Xin Sheng

Keyword(s):

Pressure Sensor ◽

Fabrication Process ◽

Sensing Element ◽

Large Area ◽

Pressure Sensing ◽

Conductive Yarns ◽

Flexible Pressure Sensor ◽

Fabric Surface ◽

The Cost ◽

Resistive Grids

AbstractThis paper presents an approach for decoding the pressure information exerted over a piece of fabric by means of resistive sensing. The proposed sensor includes a distributed resistive grids constructed by two systems of orthogonally contacted electrical conductive yarns, with no external sensing element to be attached on the fabric. Since the conductive yarns serve as the sensing and wiring elements simultaneously, this design simplifies the fabrication process, reduces the cost and makes the production of large area flexible pressure sensor possible. The location of the pressure applied on the fabric can be identified by detecting the position where the change of the resistances occurs between two embroidered yarns. Meanwhile, the magnitude of the pressure can be acquired by measuring the variations of the resistance. In order to eliminate the “crosstalk” effect between adjoining fibers, the yarns were separately wired on the fabric surface.

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