Al2O3 Atomic Layer Deposition with Trimethylaluminum and Ozone Studied by in Situ Transmission FTIR Spectroscopy and Quadrupole Mass Spectrometry

2008 ◽  
Vol 112 (49) ◽  
pp. 19530-19539 ◽  
Author(s):  
David N. Goldstein ◽  
Jarod A. McCormick ◽  
Steven M. George
Keyword(s):  
Mass Spectrometry ◽  
Atomic Layer Deposition ◽  
Ftir Spectroscopy ◽  
Atomic Layer ◽  
Quadrupole Mass ◽  
Quadrupole Mass Spectrometry ◽  
Layer Deposition

In Situ Quadrupole Mass Spectrometry Study of Atomic-Layer Deposition of ZrO2Using Cp2Zr(CH3)2and Water

Langmuir ◽  
2005 ◽  
Vol 21 (16) ◽  
pp. 7321-7325 ◽  
Author(s):  
Jaakko Niinistö ◽  
Antti Rahtu ◽  
Matti Putkonen ◽  
Mikko Ritala ◽  
Markku Leskelä ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Quadrupole Mass ◽  
Quadrupole Mass Spectrometry ◽  
Layer Deposition ◽  
Mass Spectrometry Study

Atomic layer deposition on particles using a fluidized bed reactor with in situ mass spectrometry

2007 ◽  
Vol 201 (22-23) ◽  
pp. 9163-9171 ◽  
Author(s):  
David M. King ◽  
Joseph A. Spencer ◽  
Xinhua Liang ◽  
Luis F. Hakim ◽  
Alan W. Weimer
Keyword(s):  
Mass Spectrometry ◽  
Atomic Layer Deposition ◽  
Fluidized Bed ◽  
Atomic Layer ◽  
Fluidized Bed Reactor ◽  
Layer Deposition
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