In Situ Quartz Crystal Microbalance and Quadrupole Mass Spectrometry Studies of Atomic Layer Deposition of Aluminum Oxide from Trimethylaluminum and Water

Langmuir ◽  
2001 ◽  
Vol 17 (21) ◽  
pp. 6506-6509 ◽  
Author(s):  
Antti Rahtu ◽  
Teemu Alaranta ◽  
Mikko Ritala
Keyword(s):  
Mass Spectrometry ◽  
Atomic Layer Deposition ◽  
Aluminum Oxide ◽  
Quartz Crystal Microbalance ◽  
Quartz Crystal ◽  
Atomic Layer ◽  
Quadrupole Mass ◽  
Quadrupole Mass Spectrometry ◽  
Layer Deposition

In Situ Quadrupole Mass Spectrometry Study of Atomic-Layer Deposition of ZrO2Using Cp2Zr(CH3)2and Water

Langmuir ◽  
2005 ◽  
Vol 21 (16) ◽  
pp. 7321-7325 ◽  
Author(s):  
Jaakko Niinistö ◽  
Antti Rahtu ◽  
Matti Putkonen ◽  
Mikko Ritala ◽  
Markku Leskelä ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Quadrupole Mass ◽  
Quadrupole Mass Spectrometry ◽  
Layer Deposition ◽  
Mass Spectrometry Study

scholarly journals Atomic Layer Deposition of Ternary Compounds on Cu(In,Ga)Se2: An In Situ Quartz Crystal Microbalance Study

2020 ◽  
Vol 3 (7) ◽  
pp. 7208-7215
Author(s):  
Fredrik Larsson ◽  
Lars Stolt ◽  
Adam Hultqvist ◽  
Marika Edoff ◽  
Jan Keller ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Quartz Crystal Microbalance ◽  
Quartz Crystal ◽  
Atomic Layer ◽  
Ternary Compounds ◽  
Layer Deposition

Quartz crystal microbalance study of tungsten atomic layer deposition using WF6 and Si2H6

2005 ◽  
Vol 488 (1-2) ◽  
pp. 103-110 ◽  
Author(s):  
F.H. Fabreguette ◽  
Z.A. Sechrist ◽  
J.W. Elam ◽  
S.M. George
Keyword(s):  
Atomic Layer Deposition ◽  
Quartz Crystal Microbalance ◽  
Quartz Crystal ◽  
Atomic Layer ◽  
Layer Deposition
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