Growth of Lanthanum Oxide Thin Films by Liquid Injection MOCVD Using a Novel Lathanum Alkoxide Precursor
Keyword(s):
2002 ◽
Vol 197-198
◽
pp. 522-526
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Keyword(s):
2001 ◽
Vol 174
(2)
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pp. 155-166
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2014 ◽
Vol 54
(2)
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pp. 120-124
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Keyword(s):
2015 ◽
Vol 31
◽
pp. 14-18
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Chemical vapor deposition of ruthenium oxide thin films from Ru(tmhd)3 using direct liquid injection
2002 ◽
Vol 413
(1-2)
◽
pp. 237-242
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