Formation and stability of lanthanum oxide thin films deposited from β-diketonate precursor

2001 ◽  
Vol 174 (2) ◽  
pp. 155-166 ◽  
Author(s):  
Minna Nieminen ◽  
Matti Putkonen ◽  
Lauri Niinistö
Keyword(s):  
Thin Films ◽  
Lanthanum Oxide ◽  
Oxide Thin Films

Growth of Lanthanum Oxide Thin Films by Liquid Injection MOCVD Using a Novel Lathanum Alkoxide Precursor

2004 ◽  
Vol 10 (1) ◽  
pp. 13-17 ◽  
Author(s):  
H.C. Aspinall ◽  
J. Gaskell ◽  
P.A. Williams ◽  
A.C. Jones ◽  
P.R. Chalker ◽  
...  
Keyword(s):  
Thin Films ◽  
Lanthanum Oxide ◽  
Oxide Thin Films ◽  
Liquid Injection ◽  
Alkoxide Precursor

Structural and electrical properties of lanthanum oxide thin films deposited by laser ablation

2002 ◽  
Vol 197-198 ◽  
pp. 522-526 ◽  
Author(s):  
M.F Vignolo ◽  
S Duhalde ◽  
M Bormioli ◽  
G Quintana ◽  
M Cervera ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Electrical Properties ◽  
Lanthanum Oxide ◽  
Oxide Thin Films ◽  
Structural And Electrical Properties

XPS study of sol–gel produced lanthanum oxide thin films

2014 ◽  
Vol 54 (2) ◽  
pp. 120-124 ◽  
Author(s):  
Emilis Baškys ◽  
Vladimiras Bondarenka ◽  
Sergej Grebinskij ◽  
Mindaugas Senulis ◽  
Raimundas Sereika
Keyword(s):  
Thin Films ◽  
Lanthanum Oxide ◽  
Sol Gel ◽  
Oxide Thin Films ◽  
Xps Study

MOCVD of High-Dielectric-Constant Lanthanum Oxide Thin Films

2003 ◽  
Vol 150 (8) ◽  
pp. G429 ◽  
Author(s):  
Hirotoshi Yamada ◽  
Takashi Shimizu ◽  
Akira Kurokawa ◽  
Kenichi Ishii ◽  
Eiichi Suzuki
Keyword(s):  
Thin Films ◽  
Dielectric Constant ◽  
Lanthanum Oxide ◽  
High Dielectric Constant ◽  
Oxide Thin Films ◽  
High Dielectric

Growth of Lanthanum Oxide Thin Films by Liquid Injection MOCVD Using a Novel Lanthanum Alkoxide Precursor.

ChemInform ◽  
2004 ◽  
Vol 35 (15) ◽  
Author(s):  
Helen C. Aspinall ◽  
Jeffrey Gaskell ◽  
Paul A. Williams ◽  
Anthony C. Jones ◽  
Paul R. Chalker ◽  
...  
Keyword(s):  
Thin Films ◽  
Lanthanum Oxide ◽  
Oxide Thin Films ◽  
Liquid Injection ◽  
Alkoxide Precursor

Thermal Stability of Stack Structures of Aluminum Nitride and Lanthanum Oxide Thin Films

2019 ◽  
Vol 3 (3) ◽  
pp. 121-127 ◽  
Author(s):  
Dail Eom ◽  
Cheol Seong Hwang ◽  
Hyeong Joon Kim
Keyword(s):  
Thin Films ◽  
Thermal Stability ◽  
Aluminum Nitride ◽  
Lanthanum Oxide ◽  
Oxide Thin Films ◽  
Thermal Stability Of
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