A Ballistic Transport and Surface Reaction Model for Simulating Atomic Layer Deposition Processes in High-Aspect-Ratio Nanopores
2011 ◽
Vol 17
(10-12)
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pp. 353-365
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2014 ◽
Vol 5
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pp. 234-244
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Keyword(s):
2017 ◽
Vol 146
(5)
◽
pp. 052818
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Keyword(s):
2020 ◽
Keyword(s):
Keyword(s):
Keyword(s):
2020 ◽