Oxygen radical density measurement in O2-N2 gas mixture plasma by means of a thin platinum wire

2004 ◽  
Vol 149 (4) ◽  
pp. 14-20 ◽  
Author(s):  
Nobuyuki Haraki ◽  
Saiensu Nakano ◽  
Shigeru Ono ◽  
Shinriki Teii
Keyword(s):  
Density Measurement ◽  
Oxygen Radical ◽  
Platinum Wire ◽  
Gas Mixture ◽  
Thin Platinum ◽  
Mixture Plasma

Characteristics of atmospheric-pressure non-thermal N2 and N2/O2 gas mixture plasma jet

2014 ◽  
Vol 115 (3) ◽  
pp. 033303 ◽  
Author(s):  
Dezhi Xiao ◽  
Cheng Cheng ◽  
Jie Shen ◽  
Yan Lan ◽  
Hongbing Xie ◽  
...  
Keyword(s):  
Atmospheric Pressure ◽  
Plasma Jet ◽  
Gas Mixture ◽  
Mixture Plasma

Separation of Binary Gas Mixtures by Thermal Diffusion Columns

1969 ◽  
Vol 24 (9) ◽  
pp. 1378-1382
Author(s):  
V.K. Saxena ◽  
S.C. Saxena
Keyword(s):  
Thermal Diffusion ◽  
Separation Factor ◽  
Qualitative Agreement ◽  
Gas Mixtures ◽  
Platinum Wire ◽  
Gas Mixture ◽  
Internal Diameter ◽  
Hot Wire ◽  
Mixture Separation ◽  
Special Relevance

Two hot-wire type of glass thermal diffusion columns (approximately 3 m long, 8 mm internal diameter and fitted with an axial platinum wire 0.5 mm diameter) have been used to study the characteristics of gas mixture separation. In particular, the mixtures of Ne-Ar and He-Ar are examined, and the dependence of the separation factor, q, on the pressure and composition of the gas mixture and the temperature of the hot-wire is investigated. The variation of q with pressure and temperature for nonisotopic mixtures is in qualitative agreement with the predictions of the theory for isotopic mixtures. Further q is found to increase as the proportion of the lighter component in the mixture is decreased. These conclusions are of special relevance for the purification of gas mixtures viz., the removal of the lighter gas impurity from the mixture.

Effect of N2O Flow Rate on Reliability of SiOxFilms Deposited by SiH4–N2O Gas Mixture Plasma

2009 ◽  
Vol 48 (8) ◽  
pp. 08HJ01 ◽  
Author(s):  
Nguyen Dang Nam ◽  
Jung-Gu Kim ◽  
Duck Jin Kim ◽  
Nae Eung Lee
Keyword(s):  
Flow Rate ◽  
Gas Mixture ◽  
Mixture Plasma
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