High-precision positioning of table drive system using strain feedback and disturbance observer
Keyword(s):
2011 ◽
Vol 131
(6)
◽
pp. 829-836
◽
2007 ◽
Vol 2007.4
(0)
◽
pp. 7D406
Keyword(s):
2011 ◽
Vol 131
(3)
◽
pp. 275-282
Keyword(s):