Inductively Coupled Plasma Source Using Internal Multiple U-Type Antenna for Ultra Large-Area Plasma Processing
2007 ◽
Vol 4
(S1)
◽
pp. S999-S1003
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Keyword(s):
2015 ◽
Vol 2015
(1)
◽
pp. 000757-000760
2012 ◽
Vol 45
(47)
◽
pp. 475201
◽
1996 ◽
Vol 14
(5)
◽
pp. 2859-2870
◽
2008 ◽
Vol 202
(22-23)
◽
pp. 5242-5245
◽
Keyword(s):
Keyword(s):
2019 ◽
Vol 1243
◽
pp. 012004
◽
Keyword(s):