Reduction of the electrostatic coupling in a large-area internal inductively coupled plasma source using a multicusp magnetic field
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2015 ◽
Vol 2015
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pp. 000757-000760
2012 ◽
Vol 45
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pp. 475201
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1996 ◽
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pp. 2859-2870
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Vol 28
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pp. 147-158
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2007 ◽
Vol 4
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pp. S999-S1003
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