The Dependence of Electrical and Optical Properties of RF Sputtered Amorphous Silicon–Carbon Alloy Thin Films on Substrate Temperature and Hydrogen Flow Rate

phys stat sol (a) ◽

10.1002/pssa.2211260116 ◽

1991 ◽

Vol 126 (1) ◽

pp. 143-150 ◽

Author(s):

L. Magafas ◽

N. Georgoulas ◽

D. Girginoudi ◽

A. Thanailakis

Keyword(s):

Optical Properties ◽

Substrate Temperature ◽

Amorphous Silicon ◽

Flow Rate ◽

Hydrogen Flow Rate ◽

Electrical And Optical Properties ◽

Hydrogen Flow ◽

Download Full-text

Tuning the optical properties of RF-PECVD grown μc-Si:H thin films using different hydrogen flow rate

Superlattices and Microstructures ◽

10.1016/j.spmi.2017.03.052 ◽

2017 ◽

Vol 107 ◽

pp. 172-177 ◽

Author(s):

Ghada Dushaq ◽

Ammar Nayfeh ◽

Mahmoud Rasras

Keyword(s):

Optical Properties ◽

Flow Rate ◽

Hydrogen Flow Rate ◽

Download Full-text

Effects of hydrogen flow rate on the growth and field electron emission characteristics of diamond thin films synthesized through graphite etching

Diamond and Related Materials ◽

10.1016/j.diamond.2007.02.005 ◽

2007 ◽

Vol 16 (8) ◽

pp. 1623-1627 ◽

Author(s):

X. Lu ◽

Q. Yang ◽

C. Xiao ◽

A. Hirose

Keyword(s):

Flow Rate ◽

Electron Emission ◽

Field Electron Emission ◽

Emission Characteristics ◽

Hydrogen Flow Rate ◽

Hydrogen Flow ◽

Field Electron ◽

Diamond Thin Films

Download Full-text

Study of substrate temperature and copper doping effects on structural, electrical and optical properties of Cu-doped and undoped ZnO thin films

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-016-4771-3 ◽

2016 ◽

Vol 27 (8) ◽

pp. 7822-7828 ◽

Author(s):

Peipei Zhou ◽

Haonan Liu ◽

Linao Zhang ◽

Xiaoxia Suo ◽

Zhongshuai Liang ◽

...

Keyword(s):

Optical Properties ◽

Substrate Temperature ◽

Zno Thin Films ◽

Electrical And Optical Properties ◽

Copper Doping ◽

Download Full-text

The structural, electrical, and optical properties of SnO2 films prepared by reactive magnetron sputtering: Influence of substrate temperature and O2 flow rate

Materials Chemistry and Physics ◽

10.1016/j.matchemphys.2020.123129 ◽

2020 ◽

Vol 250 ◽

pp. 123129

Author(s):

Ye Tao ◽

Bailin Zhu ◽

Yuting Yang ◽

Jun Wu ◽

Xinwei Shi

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Substrate Temperature ◽

Flow Rate ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Electrical And Optical Properties ◽

Influence Of Substrate

Download Full-text

The effect of substrate temperature on the microstructural, electrical and optical properties of Sn-doped indium oxide thin films

The European Physical Journal Applied Physics ◽

10.1051/epjap/2015150004 ◽

2015 ◽

Vol 70 (3) ◽

pp. 30302 ◽

Author(s):

Davood Raoufi ◽

Atefeh Taherniya

Keyword(s):

Optical Properties ◽

Substrate Temperature ◽

Indium Oxide ◽

Oxide Thin Films ◽

Electrical And Optical Properties

Download Full-text

Impact of substrate temperature on the microstructure, electrical and optical properties of sputtered nanoparticle V2O5 thin films

Vacuum ◽

10.1016/j.vacuum.2010.05.001 ◽

2010 ◽

Vol 85 (2) ◽

pp. 145-150 ◽

Author(s):

Zhenfei Luo ◽

Zhiming Wu ◽

Xiangdong Xu ◽

Mingjun Du ◽

Tao Wang ◽

...

Keyword(s):

Optical Properties ◽

Substrate Temperature ◽

Electrical And Optical Properties ◽

V2o5 Thin Films

Download Full-text

Disilane addition versus silane-hydrogen flow rate effect on the PECVD of silicon thin films

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4966957 ◽

2016 ◽

Vol 34 (6) ◽

pp. 061307

Author(s):

Panagiotis Dimitrakellis ◽

Eleftherios Amanatides ◽

Dimitrios Mataras ◽

Angelos G. Kalampounias ◽

Nikolaos Spiliopoulos ◽

...

Keyword(s):

Flow Rate ◽

Rate Effect ◽

Hydrogen Flow Rate ◽

Hydrogen Flow ◽

Silicon Thin Films ◽

Flow Rate Effect

Download Full-text

Influence of Substrate Temperature on Electrical and Optical Properties of Al-Doped ZnO Thin Films

Advanced Science Letters ◽

10.1166/asl.2013.5000 ◽

2013 ◽

Vol 19 (9) ◽

pp. 2567-2571

Author(s):

Shiuh-Chuan Her ◽

Tsung-Chi Chi

Keyword(s):

Optical Properties ◽

Substrate Temperature ◽

Zno Thin Films ◽

Electrical And Optical Properties ◽

Doped Zno ◽

Influence Of Substrate

Download Full-text

Effect of Substrate Temperature on the Electrical and Optical Properties of Pulsed Laser Deposited ZnO Thin Films

Sensor Letters ◽

10.1166/sl.2013.2836 ◽

2013 ◽

Vol 11 (8) ◽

pp. 1498-1503 ◽

Author(s):

S. Nagar ◽

S. Chakrabarti

Keyword(s):

Optical Properties ◽

Substrate Temperature ◽

Pulsed Laser ◽

Zno Thin Films ◽

Electrical And Optical Properties

Download Full-text

The Influence of Deposition Conditions on the Properties of a-Sic:H Thin Films

MRS Proceedings ◽

10.1557/proc-192-589 ◽

1990 ◽

Vol 192 ◽

Author(s):

L. Magafas ◽

D. Girginoudi ◽

N. Georgoulas ◽

A. Thanailakis

Keyword(s):

Chemical Composition ◽

Optical Absorption ◽

Flow Rate ◽

Growth Conditions ◽

Optical Absorption Coefficient ◽

Hydrogen Flow Rate ◽

Hydrogen Flow ◽

Composition Structure ◽

Deposition Conditions

ABSTRACTThe dependence of chemical composition, structure and optoelectronic properties of sputtered a-SiC:H thin films on substrate temperature, Ts, and hydrogen flow rate has been studied. The films are amorphous for the growth conditions used in this work. The chemical composition of the alloys is very little influenced by the Ts, whereas the hydrogen content and the optical absorption coefficient depends strongly on Ts and hydrogen flow rate.

Download Full-text