Hydrogen Incorporation in Sputter-Deposited, In-Chamber Annealed Amorphous Silicon Thin Films. An Infrared and Elastic Recoil Analysis
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2009 ◽
Vol 255
(19)
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pp. 8252-8256
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1981 ◽
Vol 14
(9)
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pp. 1363-1371
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2011 ◽
Vol 383-390
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pp. 6980-6985