Triaxial Multi-range MEMS Accelerometer Nodes for Railways Applications

2013 ◽  
pp. 463-471
Author(s):  
M. Bassetti ◽  
F. Braghin ◽  
G. Cazzulani ◽  
F. Castelli-Dezza
Keyword(s):  
Mems Accelerometer

Low-cost MEMS accelerometer network for rotating machine vibration diagnostics

2020 ◽  
Vol 23 (7) ◽  
pp. 25-33
Author(s):  
Luciane Agnoletti dos Santos Pedotti ◽  
Ricardo Mazza Zago ◽  
Mateus Giesbrecht ◽  
Fabiano Fruett
Keyword(s):  
Low Cost ◽  
Vibration Diagnostics ◽  
Mems Accelerometer ◽  
Machine Vibration ◽  
Rotating Machine

scholarly journals Displacement Estimation Based on Optical and Inertial Sensor Fusion

Sensors ◽  
2021 ◽  
Vol 21 (4) ◽  
pp. 1390
Author(s):  
Tomasz Ursel ◽  
Michał Olinski
Keyword(s):  
Sensor Fusion ◽  
Inertial Sensor ◽  
External Disturbance ◽  
Linear Displacement ◽  
Measuring System ◽  
Displacement Estimation ◽  
Mems Accelerometer ◽  
Pedestrian Navigation ◽  
Complementary Filter ◽  
Optical Flow Sensor

This article aims to develop a system capable of estimating the displacement of a moving object with the usage of a relatively cheap and easy to apply sensors. There is a growing need for such systems, not only for robots, but also, for instance, pedestrian navigation. In this paper, the theory for this idea, including data postprocessing algorithms for a MEMS accelerometer and an optical flow sensor (OFS), as well as the developed complementary filter applied for sensor fusion, are presented. In addition, a vital part of the accelerometer’s algorithm, the zero velocity states detection, is implemented. It is based on analysis of the acceleration’s signal and further application of acceleration symmetrization, greatly improving the obtained displacement. A test stand with a linear guide and motor enabling imposing a specified linear motion is built. The results of both sensors’ testing suggest that the displacement estimated by each of them is highly correct. Fusion of the sensors’ data gives even better outcomes, especially in cases with external disturbance of OFS. The comparative evaluation of estimated linear displacements, in each case related to encoder data, confirms the algorithms’ operation correctness and proves the chosen sensors’ usefulness in the development of a linear displacement measuring system.

Development of A Z-Axis Out of Plane MEMS Accelerometer

2021 ◽  
Author(s):  
Abhiraj Basavanna ◽  
Matthias Dienger ◽  
Jan Rockstroh ◽  
Steffen Keller ◽  
Alfons Dehe
Keyword(s):  
Mems Accelerometer ◽  
Out Of Plane

A CMOS-MEMS Accelerometer with U-channel Suspended Gate SOI FET

2021 ◽  
pp. 1-1
Author(s):  
Pramod Martha ◽  
Naveen Kadayinti ◽  
V. Seena
Keyword(s):  
Mems Accelerometer ◽  
Cmos Mems

Maskless lithography: an approach to SU-8 based sensitive and high-g Z-axis polymer MEMS accelerometer

2021 ◽  
Author(s):  
Mandeep Jangra ◽  
Dhairya Singh Arya ◽  
Robin Khosla ◽  
Satinder K. Sharma
Keyword(s):  
Maskless Lithography ◽  
Mems Accelerometer ◽  
Polymer Mems

scholarly journals A Low-g MEMS Accelerometer with High Sensitivity, Low Nonlinearity and Large Dynamic Range Based on Mode-Localization of 3-DoF Weakly Coupled Resonators

Micromachines ◽  
2021 ◽  
Vol 12 (3) ◽  
pp. 310
Author(s):  
Muhammad Mubasher Saleem ◽  
Shayaan Saghir ◽  
Syed Ali Raza Bukhari ◽  
Amir Hamza ◽  
Rana Iqtidar Shakoor ◽  
...  
Keyword(s):  
Microelectromechanical Systems ◽  
Dynamic Range ◽  
Proof Mass ◽  
Amplitude Ratio ◽  
Silicon On Insulator ◽  
Coupled Resonators ◽  
Mode Localization ◽  
Mems Accelerometer ◽  
Weakly Coupled ◽  
Input Acceleration

This paper presents a new design of microelectromechanical systems (MEMS) based low-g accelerometer utilizing mode-localization effect in the three degree-of-freedom (3-DoF) weakly coupled MEMS resonators. Two sets of the 3-DoF mechanically coupled resonators are used on either side of the single proof mass and difference in the amplitude ratio of two resonator sets is considered as an output metric for the input acceleration measurement. The proof mass is electrostatically coupled to the perturbation resonators and for the sensitivity and input dynamic range tuning of MEMS accelerometer, electrostatic electrodes are used with each resonator in two sets of 3-DoF coupled resonators. The MEMS accelerometer is designed considering the foundry process constraints of silicon-on-insulator multi-user MEMS processes (SOIMUMPs). The performance of the MEMS accelerometer is analyzed through finite-element-method (FEM) based simulations. The sensitivity of the MEMS accelerometer in terms of amplitude ratio difference is obtained as 10.61/g for an input acceleration range of ±2 g with thermomechanical noise based resolution of 0.22 and nonlinearity less than 0.5%.

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