Effects of Deposition Temperature and Hydrogen Plasma on the Properties of the Radio-Frequency Magnetron Sputtering Deposition of ZnO-Al2O3 Films

Intelligent Technologies and Engineering Systems - Lecture Notes in Electrical Engineering ◽

10.1007/978-1-4614-6747-2_90 ◽

2013 ◽

pp. 783-791

Author(s):

Fang-Hsing Wang ◽

Chia-Cheng Huang ◽

Chien-Chen Diao ◽

Chia-Ching Wu ◽

Cheng-Fu Yang

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Deposition Temperature ◽

Hydrogen Plasma ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Sputtering Deposition ◽

Download Full-text

Wafer-Scale Growth of ITO Nanorods by Radio Frequency Magnetron Sputtering Deposition

Journal of The Electrochemical Society ◽

10.1149/1.3562943 ◽

2011 ◽

Vol 158 (5) ◽

pp. K131 ◽

Author(s):

Jae Hyoung Park ◽

Hoo Keun Park ◽

Jinhoo Jeong ◽

Woong Kim ◽

Byoung Koun Min ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Scale Growth ◽

Sputtering Deposition ◽

Download Full-text

Extending the Photoresponse of TiO2to the Visible Light Region: Photoelectrochemical Behavior of TiO2Thin Films Prepared by the Radio Frequency Magnetron Sputtering Deposition Method

The Journal of Physical Chemistry B ◽

10.1021/jp058262g ◽

2006 ◽

Vol 110 (11) ◽

pp. 5537-5541 ◽

Author(s):

Hisashi Kikuchi ◽

Masaaki Kitano ◽

Masato Takeuchi ◽

Masaya Matsuoka ◽

Masakazu Anpo ◽

...

Keyword(s):

Magnetron Sputtering ◽

Visible Light ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Deposition Method ◽

Visible Light Region ◽

Radio Frequency Magnetron Sputtering ◽

Sputtering Deposition ◽

Light Region ◽

Magnetron Sputtering Deposition Method

Download Full-text

Radio frequency magnetron sputtering deposition of hetero-epitaxial strontium barium niobate thin films (SrxBa1−xNb2O6)

Journal of Applied Physics ◽

10.1063/1.1535749 ◽

2003 ◽

Vol 93 (3) ◽

pp. 1718-1724 ◽

Author(s):

M. Cuniot-Ponsard ◽

J. M. Desvignes ◽

B. Ea-Kim ◽

E. Leroy

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Strontium Barium Niobate ◽

Strontium Barium ◽

Sputtering Deposition

Download Full-text

Effects of deposition temperature on structure and properties of mo-doped indium oxide by radio frequency magnetron sputtering

Vacuum ◽

10.1016/j.vacuum.2010.05.016 ◽

2010 ◽

Vol 85 (2) ◽

pp. 211-213

Author(s):

Yang Hai ◽

Zhang Shu-yu ◽

Liu Wei ◽

Yuan Guo ◽

Li Jian-Ming ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Indium Oxide ◽

Deposition Temperature ◽

Radio Frequency Magnetron ◽

Structure And Properties ◽

Radio Frequency Magnetron Sputtering

Download Full-text

Radio frequency magnetron sputtering deposition of calcium phosphate coatings: The effect of resputtering on the coating composition

Journal of Applied Physics ◽

10.1063/1.1576894 ◽

2003 ◽

Vol 93 (12) ◽

pp. 9503-9507 ◽

Author(s):

B. Feddes ◽

J. G. C. Wolke ◽

J. A. Jansen ◽

A. M. Vredenberg

Keyword(s):

Calcium Phosphate ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Sputtering Deposition ◽

Phosphate Coatings ◽

Coating Composition ◽

Calcium Phosphate Coatings

Download Full-text

Effect of deposition temperature on the microstructure and electrical properties of Ba0.8Sr0.2TiO3 thin films deposited by radio-frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2007.11.122 ◽

2008 ◽

Vol 516 (10) ◽

pp. 3416-3421 ◽

Author(s):

G.C. Jha ◽

S.K. Ray ◽

I. Manna

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Deposition Temperature ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

Download Full-text

Radio frequency magnetron sputtering deposition of borate and phosphate glass films

10.1117/12.756819 ◽

2007 ◽

Author(s):

Lucica Boroica ◽

I. Boroica ◽

E. Rotiu ◽

B. Sava ◽

R. Medianu ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Phosphate Glass ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Sputtering Deposition ◽

Download Full-text

Preparation of Nitrogen-Substituted TiO2Thin Film Photocatalysts by the Radio Frequency Magnetron Sputtering Deposition Method and Their Photocatalytic Reactivity under Visible Light Irradiation†

The Journal of Physical Chemistry B ◽

10.1021/jp064893e ◽

2006 ◽

Vol 110 (50) ◽

pp. 25266-25272 ◽

Author(s):

Masaaki Kitano ◽

Keisho Funatsu ◽

Masaya Matsuoka ◽

Michio Ueshima ◽

Masakazu Anpo

Keyword(s):

Magnetron Sputtering ◽

Visible Light ◽

Radio Frequency ◽

Visible Light Irradiation ◽

Radio Frequency Magnetron ◽

Light Irradiation ◽

Deposition Method ◽

Radio Frequency Magnetron Sputtering ◽

Sputtering Deposition ◽

Magnetron Sputtering Deposition Method

Download Full-text

Radio Frequency Magnetron Sputtering Deposition of TiO2 Thin Films and Their Perovskite Solar Cell Applications

Scientific Reports ◽

10.1038/srep17684 ◽

2015 ◽

Vol 5 (1) ◽

Author(s):

Cong Chen ◽

Yu Cheng ◽

Qilin Dai ◽

Hongwei Song

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Perovskite Solar Cell ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Tio2 Thin Films ◽

Sputtering Deposition

Download Full-text

Effect of deposition temperature on the microstructure and dielectric properties of Ba0.6 Sr0.4 TiO3 thin film deposited by radio-frequency magnetron sputtering

physica status solidi (a) ◽

10.1002/pssa.200925045 ◽

2009 ◽

Vol 206 (7) ◽

pp. 1510-1514 ◽

Author(s):

Zuyong Feng ◽

Wei Chen ◽

Ooi Kiang Tan

Keyword(s):

Thin Film ◽

Dielectric Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Deposition Temperature ◽

Radio Frequency Magnetron ◽

Tio3 Thin Film ◽

Radio Frequency Magnetron Sputtering

Download Full-text