Study of PSO Optimized BP Neural Network and Smith Predictor for MOCVD Temperature Control in 7 nm 5G Chip Process

Author(s):  
Kuo-Chi Chang ◽  
Yu-Wen Zhou ◽  
Hsiao-Chuan Wang ◽  
Yuh-Chung Lin ◽  
Kai-Chun Chu ◽  
...  
2021 ◽  
Vol 11 (6) ◽  
pp. 2685
Author(s):  
Guojin Pei ◽  
Ming Yu ◽  
Yaohui Xu ◽  
Cui Ma ◽  
Houhu Lai ◽  
...  

A compliant constant-force actuator based on the cylinder is an important tool for the contact operation of robots. Due to the nonlinearity and time delay of the pneumatic system, the traditional proportional–integral–derivative (PID) method for constant force control does not work so well. In this paper, an improved PID control method combining a backpropagation (BP) neural network and the Smith predictor is proposed. Through MATLAB simulation and experimental validation, the results show that the proposed method can shorten the maximum overshoot and the adjustment time compared with traditional the PID method.


2014 ◽  
Vol 599-601 ◽  
pp. 827-830 ◽  
Author(s):  
Wei Tian ◽  
Yi Zhun Peng ◽  
Pan Wang ◽  
Xiao Yu Wang

Taking the temperature control of a refrigerated space as example, this paper designs a controller which is based on traditional PID operation and BP neural network algorithm. It has better steady-state precision and adaptive ability. Firstly, the article introduces the concepts of the refrigerated space, PID and BP algorithm. Then, the temperature control of refrigerated space is simulated in MATLAB. The PID parameters will be adjusted by simulation in BP Neural Network. The PID control parameters could be created real-time online, which makes the controller performance best.


2014 ◽  
Vol 1044-1045 ◽  
pp. 881-884
Author(s):  
Xin Wang ◽  
He Pan

In the thesis the adaptive ability of neural network strong and good nonlinear approximation ability, A controller is designed based on BP neural network by the adaptive ability of neural network strong and good nonlinear approximation ability in this paper, this method changed defect of the usual PID controller that parameters of annealing furnace condition are not easy set and the ability to adapt is poor. The new method is not only has good stability, but also has high control precision and strong adaptability.


2011 ◽  
Vol 201-203 ◽  
pp. 2003-2006
Author(s):  
Shu De Li ◽  
Yi Chen ◽  
Cai Xia Liu

Since communication network is introduced into control system, induced-delay appears. Because of the delay, the performance of networked control system becomes bad, even unsteady. Conventional Smith predictor is sensitive to error in object model and needs delay’s value in advance. Regarding random delay, its application is limited. In this paper, we propose a method based on induced-delay predicted by BP neural network, which use two historical delay values to predict the next one. Smith predictor adjusts its parameters according to that value in time. The simulating results indicate that the precision of delay-predicting can be ensured and the performance of networked control system has been improved.


2013 ◽  
Vol 313-314 ◽  
pp. 1389-1392
Author(s):  
Hua Meng ◽  
Jia Ma ◽  
Shi Feng Bao ◽  
Shao Qing Wei

This paper analyzes the synthesis of vinyl acetate production process and technology, and applied the artificial neural network modeling approach, by using the adaptive learning rate BP learning algorithm, then established the medium temperature control of BP neural network in the structure model of the VAc synthesis process of flurried bed synthesis reactor, by controlling medium temperature of the synthesis reactor, the results show that: Be able to effectively will in reactor temperature control in good accuracy.


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