Study of PSO Optimized BP Neural Network and Smith Predictor for MOCVD Temperature Control in 7 nm 5G Chip Process
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2014 ◽
Vol 599-601
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pp. 827-830
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2014 ◽
Vol 1044-1045
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pp. 881-884
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2011 ◽
Vol 201-203
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pp. 2003-2006
2019 ◽
Vol 1176
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pp. 052002
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2013 ◽
Vol 313-314
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pp. 1389-1392