Modeling of Deposition During C5F8/CO/O2/Ar Plasma Etching Using Topography and Composition Simulation
2007 ◽
pp. 425-428
2020 ◽
Vol 109
◽
pp. 104929
◽
1996 ◽
Vol 14
(4)
◽
pp. 2567
◽
Keyword(s):
2004 ◽
Vol 22
(6)
◽
pp. 2336-2341
◽
2013 ◽
Vol 2
(3)
◽
pp. P110-P113
◽
Keyword(s):
1989 ◽
Vol 63
(11)
◽
pp. 4697-4702
◽
Keyword(s):
2009 ◽
Vol 404
(22)
◽
pp. 4376-4378
◽