Automated Inclinometer Monitoring Based on Micro Electro-Mechanical System Technology: Applications and Verification

2014 ◽  
pp. 595-600 ◽  
Author(s):  
Andrea Segalini ◽  
Luca Chiapponi ◽  
Benedetta Pastarini ◽  
Corrado Carini
Keyword(s):  
Mechanical System ◽  
Micro Electro Mechanical System ◽  
System Technology ◽  
Technology Applications

A MEMS Fluid Density Sensor Based on Trapezoidal Cantilever

2011 ◽  
Vol 483 ◽  
pp. 374-377
Author(s):  
Li Bo Zhao ◽  
En Ze Huang ◽  
Gui Ming Zhang ◽  
Yu Long Zhao ◽  
Xiao Po Wang ◽  
...  
Keyword(s):  
Mechanical System ◽  
Micro Electro Mechanical System ◽  
Fluid Density ◽  
System Technology ◽  
Ansys Software ◽  
Cantilever Structure ◽  
Simulation Results ◽  
Optimum Solution

A kind of fluid density sensor based on MEMS (Micro-Electro-Mechanical-System) technology is introduced with trapezoidal cantilever structure. The rectangular cantilever and trapezoidal cantilever, based on the same parameters, are analyzed. The simulation results show that the sensitivity of trapezoidal cantilever is higher than that of rectangular cantilever. Four different sizes of trapezoidal cantilever are analyzed by modal and harmonic simulation with ANSYS Software, the optimum solution will be obtained from simulation results.

scholarly journals A bibliometric analysis of micro electro mechanical system energy harvester research

Heliyon ◽  
2021 ◽  
Vol 7 (3) ◽  
pp. e06406
Author(s):  
Ida Hamidah ◽  
Roer Eka Pawinanto ◽  
Budi Mulyanti ◽  
Jumril Yunas
Keyword(s):  
Mechanical System ◽  
Bibliometric Analysis ◽  
Energy Harvester ◽  
Micro Electro Mechanical System ◽  
System Energy

On-Chip Micro–Electro–Mechanical System Fourier Transform Infrared (MEMS FT-IR) Spectrometer-Based Gas Sensing

2016 ◽  
Vol 70 (5) ◽  
pp. 897-904 ◽  
Author(s):  
Mazen Erfan ◽  
Yasser M Sabry ◽  
Mohammad Sakr ◽  
Bassem Mortada ◽  
Mostafa Medhat ◽  
...  
Keyword(s):  
Fourier Transform ◽  
Mechanical System ◽  
Gas Sensing ◽  
Fourier Transform Infrared ◽  
Micro Electro Mechanical System ◽  
Ft Ir ◽  
On Chip

A piezoelectric micro-electro-mechanical system vector sensor with a mushroom-shaped proof mass for a dipole beam pattern

2021 ◽  
Vol 332 ◽  
pp. 113129
Author(s):  
Ara Yeon ◽  
Hong Goo Yeo ◽  
Yongrae Roh ◽  
Kyungseop Kim ◽  
Hee-Seon Seo ◽  
...  
Keyword(s):  
Mechanical System ◽  
Proof Mass ◽  
Micro Electro Mechanical System ◽  
Beam Pattern ◽  
Vector Sensor
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