A MEMS Fluid Density Sensor Based on Trapezoidal Cantilever

2011 ◽  
Vol 483 ◽  
pp. 374-377
Author(s):  
Li Bo Zhao ◽  
En Ze Huang ◽  
Gui Ming Zhang ◽  
Yu Long Zhao ◽  
Xiao Po Wang ◽  
...  
Keyword(s):  
Mechanical System ◽  
Micro Electro Mechanical System ◽  
Fluid Density ◽  
System Technology ◽  
Ansys Software ◽  
Cantilever Structure ◽  
Simulation Results ◽  
Optimum Solution

A kind of fluid density sensor based on MEMS (Micro-Electro-Mechanical-System) technology is introduced with trapezoidal cantilever structure. The rectangular cantilever and trapezoidal cantilever, based on the same parameters, are analyzed. The simulation results show that the sensitivity of trapezoidal cantilever is higher than that of rectangular cantilever. Four different sizes of trapezoidal cantilever are analyzed by modal and harmonic simulation with ANSYS Software, the optimum solution will be obtained from simulation results.

Analysis and Design of A New Micro Jerk Sensor with Viscous Coupling

2003 ◽  
Vol 15 (6) ◽  
pp. 582-587 ◽  
Author(s):  
Motohiro Fujiyoshi ◽  
◽  
Yutaka Nonomura ◽  
Fumihito Arai ◽  
Toshio Fukuda ◽  
...  
Keyword(s):  
Mechanical System ◽  
Degrees Of Freedom ◽  
Micro Electro Mechanical System ◽  
New Method ◽  
Mass Ratio ◽  
Viscous Coupling ◽  
Position Change ◽  
Analysis And Design ◽  
Simulation Results ◽  
Spring Coefficient

A new method for jerk detection (derivative of acceleration) is proposed. By using a 2 degrees of freedom (DOF) model with viscous coupling, we measure jerk directly as a position change in mass without differential circuit. Analysis by numerical formulas show the principle of the proposed jerk detection and simulation results show suitable parameters such as viscosity, mass ratio, and spring coefficient ratio for jerk detection. We also propose a micro jerk sensor based on the micro electro mechanical system (MEMS). Results of analysis show that the microstructure is suitable for the proposed viscous coupling.

scholarly journals DEVELOPMENT OF A NEW STRUCTURE OF 3-DOF PIEZORESISTIVE ACCELEROMETER TO ENHANCE THE SENSITIVITY

2010 ◽  
Vol 13 (2) ◽  
pp. 57-65
Author(s):  
Tan Duc Tran
Keyword(s):  
Mechanical System ◽  
Degrees Of Freedom ◽  
Micro Electro Mechanical System ◽  
Ansys Software ◽  
Mems Sensors ◽  
Mems Technology ◽  
Mems Device ◽  
Three Degrees Of Freedom

Nowadays, the Micro Electro Mechanical System (MEMS) technology’ has been achieved great developments. Accelerometer is one kind of the most popular MEMS sensors due to it's widely applications. In order to fabricate any MEMS device, the design and simulation have been considered seriously. This paper presents a new design of the three degrees of freedom piezoresistive accelerometer to improve the sensitivity, urgent demand from the reality. The ANSYS software was utilized to design, simulate and evaluate the advantages of this new structure compared to other sensors fabricated previously.

Design and Analysis on Symmetric MEMS Inductor

2015 ◽  
Vol 815 ◽  
pp. 364-368
Author(s):  
N. Khalid ◽  
N.I.M. Nor ◽  
W.M.W. Norhaimi ◽  
Zaliman Sauli ◽  
Vithyacharan Retnasamy
Keyword(s):  
Modeling And Simulation ◽  
Mechanical System ◽  
Computer Aided Design ◽  
Micro Electro Mechanical System ◽  
Q Factor ◽  
High Q ◽  
Computer Aided ◽  
Simulation Results ◽  
Conductor Strip ◽  
Aided Design

This paper presents the design and analysis of new proposed topology micro-electro-mechanical system (MEMS) inductor. This new symmetric MEMS inductor is designed to reduce the total length of the conductor strip and hence reduce the resistance of the metal tracks. This results significant increases in the quality (Q) factor of the inductor. In this paper, the MEMS inductor is designed using CoventorWare®, which is powerful software for MEMS computer aided design (CAD), modeling and simulation. Results indicate that new symmetric inductor topology has thehighest Q-factor and it hasbeenimproved bytwo times compared to circular inductor. The analysis revealed that area of the symmetric inductor has reduced by37.5% compared to the circular inductor. Result has proved that the reduction of length of the conductor strip has reduced the resistance of the metal tracks and results in a high Q-factor inductor.

Vehicle Accident Automatic Detection and Remote Alarm Device

2012 ◽  
Vol 1 (2) ◽  
pp. 49 ◽  
Author(s):  
Varsha Goud
Keyword(s):  
Mechanical System ◽  
Automatic Detection ◽  
Micro Electro Mechanical System ◽  
Road Accident ◽  
Vibration Sensor ◽  
Severe Accident ◽  
The Road ◽  
Rescue Team ◽  
Alert Message ◽  
Optimum Solution

<p>The Rapid growth of  technology and infrastructure has made our lives more easy . The advent of technology has also increased the traffic hazards and the  road  accident take place frequently which causes huge loss of life and property because of the poor emergency facilities. Our project will provide an optimum solution to this draw back. An accelerometer can be used in a car alarm application so that dangerous driving can be detected . It can be used as a crash or rollover detector of the vehicle during and after a crash. With signals from an accelerometer, a severe accident can be recognized. According to this project when a vehicle meets with an accident immediately Vibration sensor will detect the signal or if a car rolls over, an Micro electro mechanical system(MEMS) sensor will detects the signal and sends it to ARM controller. Microcontroller sends the alert message through the GSM MODEM including the location to police control room or a rescue team. So the police can immediately trace the location through the GPS MODEM, after receiving the information. Then after conforming the location necessary action will be taken. If the person meets with a small accident or if there is no serious threat to anyone`s life, then the alert message can be terminated by the driver by a switch provided in order to avoid wasting the valuable time of the medical rescue team.</p> <p>This paper is useful in detecting the accident precisely by means of both vibration sensor and Micro electro Mechanical system(MEMS) or accelerometer. As there is a scope for improvement and as a future implementation we can add a wireless webcam for capturing the images which will help in providing driver`s assistance.</p> <p>Keywords - Accident ,Automatic Detection, Micro electro Mechanical system , Remote Alarm Device, Vehicle</p>

scholarly journals Simulation and Nonlinearity Optimization of a High-Pressure Sensor

Sensors ◽  
2020 ◽  
Vol 20 (16) ◽  
pp. 4419
Author(s):  
Ting Li ◽  
Haiping Shang ◽  
Weibing Wang
Keyword(s):  
High Pressure ◽  
Pressure Sensor ◽  
Pressure Sensors ◽  
Original Model ◽  
Ansys Software ◽  
Nonlinear Error ◽  
Sensor Model ◽  
Optimized Model ◽  
Simulation Results ◽  
Better Than

A pressure sensor in the range of 0–120 MPa with a square diaphragm was designed and fabricated, which was isolated by the oil-filled package. The nonlinearity of the device without circuit compensation is better than 0.4%, and the accuracy is 0.43%. This sensor model was simulated by ANSYS software. Based on this model, we simulated the output voltage and nonlinearity when piezoresistors locations change. The simulation results showed that as the stress of the longitudinal resistor (RL) was increased compared to the transverse resistor (RT), the nonlinear error of the pressure sensor would first decrease to about 0 and then increase. The theoretical calculation and mathematical fitting were given to this phenomenon. Based on this discovery, a method for optimizing the nonlinearity of high-pressure sensors while ensuring the maximum sensitivity was proposed. In the simulation, the output of the optimized model had a significant improvement over the original model, and the nonlinear error significantly decreased from 0.106% to 0.0000713%.

Fabrication of Monolithic Integrated Bimaterial Resonant Uncooled IR Sensor

2013 ◽  
Vol 543 ◽  
pp. 176-179 ◽  
Author(s):  
D.Q. Zhao ◽  
Xia Zhang ◽  
P. Liu ◽  
F. Yang ◽  
C. Lin ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Hole Mobility ◽  
Micro Electro Mechanical System ◽  
Cmos Process ◽  
Standard Cmos Process ◽  
Ir Sensor ◽  
Cantilever Structure ◽  
Cmos Mems ◽  
On Chip ◽  
Micro Cantilever

In this work we studied the fabrication of a monolithic bimaterial micro-cantilever resonant IR sensor with on-chip drive circuits. The effects of high temperature process and stress induced performance degradation were investigated. The post-CMOS MEMS (micro electro mechanical system) fabrication process of this IR sensor is the focus of this paper, starting from theoretical analysis and simulation, and then moving to experimental verification. The capacitive cantilever structure was fabricated by surface micromachining method, and drive circuits were prepared by standard CMOS process. While the stress introduced by MEMS films, such as the tensile silicon nitride which works as a contact etch stopper layer for MOSFETs and releasing stop layer for the MEMS structure, increases the electron mobility of NMOS, PMOS hole mobility decreases. Moreover, the NMOS threshold voltage (Vth) shifts, and transconductance (Gm) degrades. An additional step of selective removing silicon nitride capping layer and polysilicon layer upon IC area were inserted into the standard CMOS process to lower the stress in MOSFET channel regions. Selective removing silicon nitride and polysilicon before annealing can void 77% Vth shift and 86% Gm loss.

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