AbstractIn electron-backscatter diffraction, crystalline orientation maps are formed while the electron beam of an SEM scans the sample surface. EBSD requires a flat sample to avoid shadowing of the electrons from the detector by surface features. In this work, we investigate the preparation of CdTe samples deposited by close-spaced sublimation for EBSD analysis. Untreated samples were rough, resulting in areas with no EBSD signal. We processed the samples by polishing and ion-beam milling. Polishing produced flat samples, but low-quality EBDS data, because the top surface of the samples had poor crystallinity. In contrast, ion-beam milling proved to be suitable for producing flat samples with minimal surface damage, yielding good EBSD data. We also analyzed the samples with atomic force microscopy, and correlated the quality of the EBSD data with sample roughness. The EBSD data showed that the CdTe films were randomly oriented and had columnar growth and a high density of <111> twin boundaries.
Crystallographic mapping of ferroelectric thin films using piezoresponse force microscopy and electron backscatter diffraction
