Epitaxial layer thickness measurements using Fourier Transform Infrared Spectroscopy (FTIR)

Journal of Electronic Materials ◽

10.1007/bf02651743 ◽

1990 ◽

Vol 19 (2) ◽

pp. 181-185 ◽

Author(s):

R. A. Moellering ◽

L. B. Bauer ◽

C. L. Balestra

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Fourier Transform Infrared Spectroscopy ◽

Layer Thickness ◽

Epitaxial Layer ◽

Fourier Transform Infrared ◽

Thickness Measurements

Download Full-text

Determination of Indium Arsenide Autoepitaxial Layer Thickness by Fourier–Transform Infrared Spectroscopy

Izvestiya Vysshikh Uchebnykh Zavedenii Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering ◽

10.17073/1609-3577-2014-3-194-198 ◽

2015 ◽

pp. 194

Author(s):

O. S. Komkov ◽

D. D. Firsov ◽

E. A. Kovalishina ◽

A. S. Petrov

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Fourier Transform Infrared Spectroscopy ◽

Layer Thickness ◽

Indium Arsenide ◽

Fourier Transform Infrared

Download Full-text

Epi-film thickness measurements using emission Fourier transform infrared spectroscopy. I. Sensor characterization

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/66.401010 ◽

1995 ◽

Vol 8 (3) ◽

pp. 333-339 ◽

Author(s):

Zhen-Hong Zhou ◽

R. Reif

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Film Thickness ◽

Fourier Transform Infrared Spectroscopy ◽

Fourier Transform Infrared ◽

Thickness Measurements

Download Full-text

Fundamentals of epitaxial silicon film thickness measurements using emission and reflection Fourier transform infrared spectroscopy

Journal of Applied Physics ◽

10.1063/1.354023 ◽

1993 ◽

Vol 73 (11) ◽

pp. 7331-7337 ◽

Author(s):

Zhen‐Hong Zhou ◽

Isabel Yang ◽

Fuzhong Yu ◽

Rafael Reif

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Film Thickness ◽

Fourier Transform Infrared Spectroscopy ◽

Silicon Film ◽

Fourier Transform Infrared ◽

Epitaxial Silicon ◽

Thickness Measurements ◽

Epitaxial Silicon Film

Download Full-text

Foam Films Stabilized with Lysophosphatidylcholine: A Comparison of Microinterferometric and Fourier Transform Infrared Spectroscopy Thickness Measurements

Langmuir ◽

10.1021/la9621022 ◽

1997 ◽

Vol 13 (12) ◽

pp. 3172-3176 ◽

Author(s):

R. Cohen ◽

D. Exerowa ◽

T. Kolarov ◽

T. Yamanaka ◽

T. Tano

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Fourier Transform Infrared Spectroscopy ◽

Fourier Transform Infrared ◽

Thickness Measurements

Download Full-text

Epifilm thickness measurements using Fourier transform infrared spectroscopy: Effect of refractive index dispersion and refractive index measurement

Journal of Applied Physics ◽

10.1063/1.357595 ◽

1994 ◽

Vol 76 (4) ◽

pp. 2448-2454 ◽

Author(s):

Zhen‐Hong Zhou ◽

Byungin Choi ◽

M. I. Flik ◽

S. Fan ◽

Rafael Reif

Keyword(s):

Refractive Index ◽

Fourier Transform ◽

Infrared Spectroscopy ◽

Fourier Transform Infrared Spectroscopy ◽

Fourier Transform Infrared ◽

Refractive Index Dispersion ◽

Refractive Index Measurement ◽

Index Measurement ◽

Thickness Measurements

Download Full-text

290. Preliminary Surface Evaluation of Isocyanate Containing Materials at Manufactring Locations Using Surface Reflectance Fourier Transform Infrared Spectroscopy

10.3320/1.2763139 ◽

1999 ◽

Author(s):

P. Logan ◽

W. Reagen

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Fourier Transform Infrared Spectroscopy ◽

Fourier Transform Infrared ◽

Surface Reflectance

Download Full-text

Subclonal typing of ST131 E. coli by Fourier-transform infrared spectroscopy reveals variable metabolic profiles within the predominant H30 subclone

10.26226/morressier.56d5ba27d462b80296c96005 ◽

2016 ◽

Author(s):

Angela Novais

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Fourier Transform Infrared Spectroscopy ◽

Fourier Transform Infrared ◽

Metabolic Profiles ◽

Download Full-text

Optically accessible bench-scale fast pyrolysis reactor for in-situ analysis using Fourier transform infrared spectroscopy

10.31274/etd-180810-4710 ◽

2016 ◽

Author(s):

Eric Kok Hsien Chon

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Fourier Transform Infrared Spectroscopy ◽

Fast Pyrolysis ◽

Fourier Transform Infrared ◽

In Situ Analysis ◽

Bench Scale ◽

Pyrolysis Reactor

Download Full-text

Measurements of terpene emissions from wood chip piles using Fourier transform infrared spectroscopy (FTIR)

Nordic Pulp & Paper Research Journal ◽

10.3183/npprj-1992-07-03-p155-157 ◽

1992 ◽

Vol 7 (3) ◽

pp. 155-157 ◽

Author(s):

Håkan Axelsson ◽

Curt-Åke Bostrom ◽

David Cooper ◽

Urban Svedberg

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Fourier Transform Infrared Spectroscopy ◽

Wood Chip ◽

Fourier Transform Infrared

Download Full-text

Workplace air � Analysis of respirable crystalline silica by Fourier-Transform Infrared spectroscopy

10.3403/30288735u ◽

2018 ◽

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Fourier Transform Infrared Spectroscopy ◽

Fourier Transform Infrared ◽

Crystalline Silica ◽

Air Analysis ◽

Download Full-text