Epifilm thickness measurements using Fourier transform infrared spectroscopy: Effect of refractive index dispersion and refractive index measurement

Refractive Index Dispersion ◽

Refractive Index Measurement ◽

Index Measurement ◽

Epi-film thickness measurements using emission Fourier transform infrared spectroscopy. I. Sensor characterization

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/66.401010 ◽

1995 ◽

Vol 8 (3) ◽

pp. 333-339 ◽

Cited By ~ 3

Author(s):

Zhen-Hong Zhou ◽

R. Reif

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Film Thickness ◽

Epitaxial layer thickness measurements using Fourier Transform Infrared Spectroscopy (FTIR)

Journal of Electronic Materials ◽

10.1007/bf02651743 ◽

1990 ◽

Vol 19 (2) ◽

pp. 181-185 ◽

Cited By ~ 4

Author(s):

R. A. Moellering ◽

L. B. Bauer ◽

C. L. Balestra

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Layer Thickness ◽

Epitaxial Layer ◽

Fundamentals of epitaxial silicon film thickness measurements using emission and reflection Fourier transform infrared spectroscopy

Journal of Applied Physics ◽

10.1063/1.354023 ◽

1993 ◽

Vol 73 (11) ◽

pp. 7331-7337 ◽

Cited By ~ 6

Author(s):

Zhen‐Hong Zhou ◽

Isabel Yang ◽

Fuzhong Yu ◽

Rafael Reif

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Film Thickness ◽

Silicon Film ◽

Epitaxial Silicon ◽

Thickness Measurements ◽

Epitaxial Silicon Film

Foam Films Stabilized with Lysophosphatidylcholine: A Comparison of Microinterferometric and Fourier Transform Infrared Spectroscopy Thickness Measurements

Langmuir ◽

10.1021/la9621022 ◽

1997 ◽

Vol 13 (12) ◽

pp. 3172-3176 ◽

Cited By ~ 7

Author(s):

R. Cohen ◽

D. Exerowa ◽

T. Kolarov ◽

T. Yamanaka ◽

T. Tano

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Foam Films ◽

Investigation of poly(vinyl chloride)/polystyrene mixture miscibility: Comparison of viscometry criteria with Fourier transform infrared spectroscopy and refractive index measurements

Journal of Applied Polymer Science ◽

10.1002/app.32855 ◽

2010 ◽

Vol 119 (5) ◽

pp. 2770-2777 ◽

Cited By ~ 7

Author(s):

Kátia Aparecida da S. Aquino ◽

Flávio Ferreira da Silva ◽

Elmo S. Araújo

Keyword(s):

Refractive Index ◽

Fourier Transform ◽

Infrared Spectroscopy ◽

Vinyl Chloride ◽

Poly Vinyl Chloride

290. Preliminary Surface Evaluation of Isocyanate Containing Materials at Manufactring Locations Using Surface Reflectance Fourier Transform Infrared Spectroscopy

10.3320/1.2763139 ◽

1999 ◽

Author(s):

P. Logan ◽

W. Reagen

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Surface Reflectance

Subclonal typing of ST131 E. coli by Fourier-transform infrared spectroscopy reveals variable metabolic profiles within the predominant H30 subclone

10.26226/morressier.56d5ba27d462b80296c96005 ◽

2016 ◽

Author(s):

Angela Novais

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Metabolic Profiles ◽

E Coli

Optically accessible bench-scale fast pyrolysis reactor for in-situ analysis using Fourier transform infrared spectroscopy

10.31274/etd-180810-4710 ◽

2016 ◽

Author(s):

Eric Kok Hsien Chon

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Fast Pyrolysis ◽

In Situ Analysis ◽

Bench Scale ◽

Pyrolysis Reactor

Measurements of terpene emissions from wood chip piles using Fourier transform infrared spectroscopy (FTIR)

Nordic Pulp & Paper Research Journal ◽

10.3183/npprj-1992-07-03-p155-157 ◽

1992 ◽

Vol 7 (3) ◽

pp. 155-157 ◽

Cited By ~ 2

Author(s):

Håkan Axelsson ◽

Curt-Åke Bostrom ◽

David Cooper ◽

Urban Svedberg

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Wood Chip ◽

Fourier Transform Infrared

Workplace air � Analysis of respirable crystalline silica by Fourier-Transform Infrared spectroscopy

10.3403/30288735u ◽

2018 ◽

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Crystalline Silica ◽

Air Analysis ◽

Workplace Air