The effects of thermal annealing on the microstructural, optical and electrical properties of beta silicon carbide films implanted with boron or nitrogen
1989 ◽
Vol 18
(2)
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pp. 157-165
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2011 ◽
Vol 46
(13)
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pp. 4479-4486
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Keyword(s):
1997 ◽
Vol 80
(3)
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pp. 30-38
2018 ◽
Vol 75
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pp. 214-220
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Keyword(s):
2012 ◽
Vol 7
(6)
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pp. 629-632
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2017 ◽
Vol 13
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pp. 112-118
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Keyword(s):