This paper presents macro-micro dual-drive stages using the hybrid actuators composed of voice coil motor (VCM) and piezoelectric actuator (PZT actuator). The macro stage driven by voice coil motor can achieve large travel range and coarse positioning. The micro stage with an embedded flexure hinges mechanism, actuated by the PZT actuator, can realize short range but high precision positioning. To gain precise performance, the dynamic modes of macro stage and micro stage are equivalent to mass-damping-spring system in this research. According to theoretical analysis, the output displacement of micro stage is proportional to the extension of the PZT Actuator. The linear relationship will be used to the motion control of micro stage. To realize perfect performance, the variable gain PID controller is designed to control the macro stage. In order to prevent saturation and damage of PZT actuator, dual switching control, positioning error threshold and small vibration displacement, are applied to the switching control. Beyond the micro stage range, the micro stage must be kept in its equilibrium position while the VCM instead reaches a long travel. The PZT actuator controller is used to compensate for position error after switching control. When the error is less than a set thres hold value, the error signal is added into the micro control loop. So the macro-micro dual-drive stages are working together to reduce the positioning error. The relationship between PZT actuator of closed loop and input voltage is linear by theoretical analysis and experiment test. So the micro stage uses an open servo loop structure, but the PZT actuator is controlled with PI controller in local closed loop in order to eliminate the nonlinear of PZT. The experimental system used in this study is single-axis dual-driving stages. Turbo PMAC PCI-Lite is the core of the whole system and executes PLC programs with motion programs. Experiments show that the steady state error of dual-drive stage is nano level. The steady state error of dual-drive stage can be improved. So dual-drive stages can increase the positioning accuracy of the whole system and the performance is superior to the single VCM stage.
Analysis of an annular PZT actuator for a droplet ejector
