Design and performance analysis of capacitive micromachined ultrasonic transducer (CMUT) array for underwater imaging

2015 ◽  
Vol 22 (12) ◽  
pp. 2939-2947 ◽  
Author(s):  
Rui Zhang ◽  
Chenyang Xue ◽  
Changde He ◽  
Yongmei Zhang ◽  
Jinlong Song ◽  
...  
Keyword(s):  
Performance Analysis ◽  
Ultrasonic Transducer ◽  
Underwater Imaging ◽  
Capacitive Micromachined Ultrasonic Transducer ◽  
And Performance

Design and Experiment of Capacitive Micromachined Ultrasonic Transducer Array for High-Frequency Underwater Imaging

2020 ◽  
Vol 13 ◽  
Author(s):  
Yuanyu Yu ◽  
Jiujiang Wang ◽  
Xin Liu ◽  
Sio Hang Pun ◽  
Weibao Qiu ◽  
...  
Keyword(s):  
Ultrasound Imaging ◽  
High Frequency ◽  
Ultrasonic Transducer ◽  
Center Frequency ◽  
Design Parameters ◽  
Underwater Imaging ◽  
Release Process ◽  
Steel Wires ◽  
Capacitive Micromachined Ultrasonic Transducer ◽  
Frequency Ultrasound

Background:: Ultrasound is widely used in the applications of underwater imaging. Capacitive micromachined ultrasonic transducer (CMUT) is a promising candidate to the traditional piezoelectric ultrasonic transducer. In underwater ultrasound imaging, better resolutions can be achieved with a higher frequency ultrasound. Therefore, a CMUT array for high-frequency ultrasound imaging is proposed in this work. Methods:: Analytical methods are used to calculate the center frequency in water and the pull-in voltage for determining the operating point of CMUT. Finite element method model was developed to finalize the design parameters. The CMUT array was fabricated with a five-mask sacrificial release process. Results:: The CMUT array owned an immersed center frequency of 2.6 MHz with a 6 dB fractional bandwidth of 123 %. The pull-in voltage of the CMUT array was 85 V. An underwater imaging experiment was carried out with the target of three steel wires. Conclusion:: In this study, we have developed CMUT for high-frequency underwater imaging. The experiment showed that the CMUT can detect the steel wires with the diameter of 100 μm and the axial resolution was 0.582 mm, which is close to one wavelength of ultrasound in 2.6 MHz.

scholarly journals Investigation on Design Theory and Performance Analysis of Vacuum Capacitive Micromachined Ultrasonic Transducer

Micromachines ◽  
2021 ◽  
Vol 12 (9) ◽  
pp. 1127
Author(s):  
Xiao Huang ◽  
Hongliang Wang ◽  
Lijun Yu
Keyword(s):  
Influencing Factors ◽  
Design Theory ◽  
Structural Parameters ◽  
Cell Structure ◽  
Ultrasonic Transducer ◽  
Simulation Software ◽  
Performance Parameters ◽  
Element Simulation ◽  
Capacitive Micromachined Ultrasonic Transducer ◽  
And Performance

The capacitive micromachined ultrasonic transducer (CMUT), as a new acoustic-electric conversion element, has a promising application prospect. In this paper, the structure of the vacuum capacitive micromachined ultrasonic transducer is presented, and its performance-influencing factors are investigated. Firstly, the influencing factors of the performance parameters of the vacuum CMUT are analyzed theoretically based on the circular plate model and flat plate capacitance model, and the design principles of the structural parameters of the CMUT cell are proposed. Then, the finite element simulation software COMSOL Multiphysics is used to construct CMUT cell models with different membrane materials, membrane shapes, membrane radius thicknesses, and cavity heights for simulation verification. The results show that both the membrane parameters and the cavity heights affect the performance parameters of the Vacuum CMUT. In order to improve the efficiency of the CMUT, materials with low bending stiffness should be selected, and the filling factor of the membrane should be increased. In order to achieve high-transmission sound pressure, a smaller radius thickness and a larger cavity height should be selected. To achieve high reception sensitivity, a larger membrane radius thickness and a smaller cavity height should be selected. In order to obtain high fractional bandwidth, a larger membrane radius thickness should be selected. The results of this paper provide a basis for the design of Vacuum CMUT cell structure.

Simulation Analysis and Performance Testing Investigation of Capacitive Micromachined Ultrasonic Transducer

2018 ◽  
Vol 32 (09) ◽  
pp. 1858004 ◽  
Author(s):  
Hongliang Wang ◽  
Yunfei Lv ◽  
Chaojie Wang ◽  
Xiangjun Wang ◽  
Changde He ◽  
...  
Keyword(s):  
Electromechanical Coupling ◽  
Simulation Analysis ◽  
Ultrasonic Transducer ◽  
Performance Testing ◽  
Test System ◽  
Ultrasonic Waves ◽  
Electromechanical Coupling Coefficient ◽  
Response Analysis ◽  
Underwater Imaging ◽  
Capacitive Micromachined Ultrasonic Transducer

In various applications of ultrasonic waves, the ultrasonic transducer is the key device of ultrasonic testing and ultrasonic imaging. Compared with the traditional piezoelectric transducer, the capacitive micromachined ultrasonic transducer (CMUT) has many striking advantages, such as low impedance, high bandwidth, easy integration and low cost, and it is expected to become a next generation of mainstream products. In this paper, a CMUT structure for underwater-imaging applications is designed, and the finite element model is established by using COMSOL software, then the modal analysis, harmonic response analysis, electromechanical coupling analysis and transient analysis are carried out. As a consequence, the key parameters of CMUT are obtained, namely resonance frequency, voltage collapse and electromechanical coupling coefficient. For the processed CMUT line array consisting of 16 elements, a test system is built and the emission performance, receiving performance, directivity, bandwidth and preliminary imaging of the designed transducer are tested and analyzed. The results show that the designed CMUT array can meet the requirements of underwater-imaging applications.

Design of capacitive micromachined ultrasonic transducer (CMUT) linear array for underwater imaging

Sensor Review ◽  
2016 ◽  
Vol 36 (1) ◽  
pp. 77-85 ◽  
Author(s):  
Rui Zhang ◽  
Wendong Zhang ◽  
Changde He ◽  
Jinlong Song ◽  
Linfeng Mu ◽  
...  
Keyword(s):  
Electromechanical Coupling ◽  
Linear Array ◽  
Ultrasonic Transducer ◽  
Impedance Matching ◽  
Market Potential ◽  
Electromechanical Coupling Coefficient ◽  
High Angular Resolution ◽  
Underwater Imaging ◽  
Content Type ◽  
Capacitive Micromachined Ultrasonic Transducer

Purpose – The purpose of this paper was to develop a novel capacitive micromachined ultrasonic transducer (CMUT) reception and transmission linear array for underwater imaging at 400 kHz. Compared with traditional CMUTs, the developed transducer array offers higher electromechanical coupling coefficient and higher directivity performance. Design/methodology/approach – The configuration of the newly developed CMUT reception and transmission array was determined by the authors’ previous research into new element structures with patterned top electrodes and into directivity simulation analysis. Using the Si-Silicon on insulator (Si-SOI) bonding technique and the principle of acoustic impedance matching, the CMUT array was fabricated and packaged. In addition, underwater imaging system design and testing based on the packaged CMUT 1 × 16 array were completed. Findings – The simulation results showed that the optimized CMUT array configuration was selected. Furthermore, the designed configuration of the CMUT 1 × 16 linear array was good enough to guarantee high angular resolution. The underwater experiments were conducted to demonstrate that this CMUT array can be of great benefit in imaging applications. Practical implications – Based on our research, the CMUT linear array has good directivity and good impedance matching with water and can be used for obstacle avoidance, distance measurement and imaging underwater. Originality/value – This research provides a basis for CMUT directivity theory and array design. CMUT array presented in this paper has good directivity and has been applied in the underwater imaging, resulting in a huge market potential in underwater detection systems.

TINGKAT KEPUASAN PESERTA LELANG TERHADAP PELAYANAN TEMPAT PELELANGAN IKAN (TPI) MORODEMAK

2019 ◽  
Vol 13 (2) ◽  
pp. 122-130
Author(s):  
Dian ayunita Nugraheni nurmala Dewi
Keyword(s):  
Performance Analysis ◽  
Service Quality ◽  
Gap Analysis ◽  
Quality Measurement ◽  
Service Satisfaction ◽  
Importance Value ◽  
Auction House ◽  
Participant Satisfaction ◽  
And Performance ◽  
Descriptive Method

Objectives of this study were analyze fish auction participant satisfaction to auction services in TPI Morodemak, analyze attributes effect, services that fit to service quality measurement, and analyzed fish auction participants perception to performance and importance for fish auction house Morodemak services. Used descriptive method and purposive sampling with 49 respondents consists of commercial fishmongers, traditional fishmongers, purse seine owners, and boat lift net owners as fish auction participant. Satisfication measurement used Customer Satisfication Index (CSI), Importance and Performance Analysis (IPA) and gap analysis. Results from this study were value CSI 20% (0.2) indicate the auction participants dissatisfied with the services provided, IPA show there are four attributes should be develop, two elements have not been completed based on measurement requirements of service satisfaction, gap value average -0.05 means the auction participants were not satisfied with the performance of TPI services because the performance value was lower than the importance value.

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