scholarly journals Design and Performance Analysis of Capacitive Micromachined Ultrasonic Transducer Linear Array

Micromachines ◽  
2014 ◽  
Vol 5 (3) ◽  
pp. 420-431 ◽  
Author(s):  
Hongliang Wang ◽  
Xiangjun Wang ◽  
Changde He ◽  
Chenyang Xue
Sensor Review ◽  
2021 ◽  
Vol ahead-of-print (ahead-of-print) ◽  
Author(s):  
Tian Zhang ◽  
Wendong Zhang ◽  
XingLing Shao ◽  
Yang Wu

Purpose Because of the small size and high integration of capacitive micromachined ultrasonic transducer (CMUT) component, it can be made into large-scale array, but this lead to high hardware complexity, so the purpose of this paper is to use less elements to achieve better imaging results. In this research, an optimized sparse array is studied, which can suppress the side lobe and reduce the imaging artifacts compared with the equispaced sparse array with the same number of elements. Design/methodology/approach Genetic algorithm is used to sparse the CMUT linear array, and Kaiser window apodization is added to reduce imaging artifacts, the beam pattern and peak-to-side lobe ratio are calculated, point targets imaging comparisons are performed. Furthermore, a 256-elements CMUT linear array is used to carry out the imaging experiment of embedded mass and forearm blood vessel, and the imaging results are compared quantitatively. Findings Through the imaging comparison of embedded mass and forearm blood vessel, the feasibility of optimized sparse array of CMUT is verified, and the purpose of reducing the hardware complexity is achieved. Originality/value This research provides a basis for the large-scale CMUT array to reduce the hardware complexity and the amount of calculation. At present, the CMUT array has been used in medical ultrasound imaging and has huge market potential.


Micromachines ◽  
2021 ◽  
Vol 12 (9) ◽  
pp. 1127
Author(s):  
Xiao Huang ◽  
Hongliang Wang ◽  
Lijun Yu

The capacitive micromachined ultrasonic transducer (CMUT), as a new acoustic-electric conversion element, has a promising application prospect. In this paper, the structure of the vacuum capacitive micromachined ultrasonic transducer is presented, and its performance-influencing factors are investigated. Firstly, the influencing factors of the performance parameters of the vacuum CMUT are analyzed theoretically based on the circular plate model and flat plate capacitance model, and the design principles of the structural parameters of the CMUT cell are proposed. Then, the finite element simulation software COMSOL Multiphysics is used to construct CMUT cell models with different membrane materials, membrane shapes, membrane radius thicknesses, and cavity heights for simulation verification. The results show that both the membrane parameters and the cavity heights affect the performance parameters of the Vacuum CMUT. In order to improve the efficiency of the CMUT, materials with low bending stiffness should be selected, and the filling factor of the membrane should be increased. In order to achieve high-transmission sound pressure, a smaller radius thickness and a larger cavity height should be selected. To achieve high reception sensitivity, a larger membrane radius thickness and a smaller cavity height should be selected. In order to obtain high fractional bandwidth, a larger membrane radius thickness should be selected. The results of this paper provide a basis for the design of Vacuum CMUT cell structure.


Sensor Review ◽  
2016 ◽  
Vol 36 (1) ◽  
pp. 77-85 ◽  
Author(s):  
Rui Zhang ◽  
Wendong Zhang ◽  
Changde He ◽  
Jinlong Song ◽  
Linfeng Mu ◽  
...  

Purpose – The purpose of this paper was to develop a novel capacitive micromachined ultrasonic transducer (CMUT) reception and transmission linear array for underwater imaging at 400 kHz. Compared with traditional CMUTs, the developed transducer array offers higher electromechanical coupling coefficient and higher directivity performance. Design/methodology/approach – The configuration of the newly developed CMUT reception and transmission array was determined by the authors’ previous research into new element structures with patterned top electrodes and into directivity simulation analysis. Using the Si-Silicon on insulator (Si-SOI) bonding technique and the principle of acoustic impedance matching, the CMUT array was fabricated and packaged. In addition, underwater imaging system design and testing based on the packaged CMUT 1 × 16 array were completed. Findings – The simulation results showed that the optimized CMUT array configuration was selected. Furthermore, the designed configuration of the CMUT 1 × 16 linear array was good enough to guarantee high angular resolution. The underwater experiments were conducted to demonstrate that this CMUT array can be of great benefit in imaging applications. Practical implications – Based on our research, the CMUT linear array has good directivity and good impedance matching with water and can be used for obstacle avoidance, distance measurement and imaging underwater. Originality/value – This research provides a basis for CMUT directivity theory and array design. CMUT array presented in this paper has good directivity and has been applied in the underwater imaging, resulting in a huge market potential in underwater detection systems.


2019 ◽  
Vol 13 (2) ◽  
pp. 122-130
Author(s):  
Dian ayunita Nugraheni nurmala Dewi

Objectives of this study were analyze fish auction participant satisfaction to auction services in TPI Morodemak, analyze attributes effect, services that fit to service quality measurement, and analyzed fish auction participants perception to performance and importance for fish auction house Morodemak services. Used descriptive method and purposive sampling with 49 respondents consists of commercial fishmongers, traditional fishmongers, purse seine owners, and boat lift net owners as fish auction participant. Satisfication measurement used Customer Satisfication Index (CSI), Importance and Performance Analysis (IPA) and gap analysis. Results from this study were value CSI 20% (0.2) indicate the auction participants dissatisfied with the services provided, IPA show there are four attributes should be develop, two elements have not been completed based on measurement requirements of service satisfaction, gap value average -0.05 means the auction participants were not satisfied with the performance of TPI services because the performance value was lower than the importance value.


2018 ◽  
Vol 2 (01) ◽  
pp. 14
Author(s):  
Eddy Supardi

The Tax Payer obidience in fulfiling their taxation obligation will be influenced a lot by the satisfaction level toward the service fiscus. The aim of this observation is to know the response of Tax Payer toward service quality through importance and performance. The population which become the object of this observation is the personal Tax Payer registered in Bogor Tax Service Office and the number of respondents taken as the sample are 100 respondents with Slovin formula. The analysis method used is descriptive analysis and importance-performance analysis.   The result of this observation will be able to be used as one of the input to Bogor Tax Service Office in improving the quality service and for the following observation, especially those who take the same object as the observation in order to improve the quality service to the Tax Payer based on the service of its working way which is felt less. Otherwise it is important for The Tax Payer, maintaining the good work or balancing the service quality based on the working way which is evaluated less important by The Taxe Payer, but has been done reasonably well or very well by The Service Office


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