A new sacrificial layer method of LIGA technology to fabricate movable part of a gripper

2000 ◽  
Vol 6 (4) ◽  
pp. 154-156 ◽  
Author(s):  
F. Yi ◽  
E. Tang ◽  
J. Zhang ◽  
D. Xian
Author(s):  
Minakhi Pujari ◽  
Joachim Frank

In single-particle analysis of macromolecule images with the electron microscope, variations of projections are often observed that can be attributed to the changes of the particle’s orientation on the specimen grid (“rocking”). In the multivariate statistical analysis (MSA) of such projections, a single factor is often found that expresses a large portion of these variations. Successful angle calibration of this “rocking factor” would mean that correct angles can be assigned to a large number of particles, thus facilitating three-dimensional reconstruction.In a study to explore angle calibration in factor space, we used 40S ribosomal subunits, which are known to rock around an axis approximately coincident with their long axis. We analyzed micrographs of a field of these particles, taken with 20° tilt and without tilt, using the standard methods of alignment and MSA. The specimen was prepared with the double carbon-layer method, using uranyl acetate for negative staining. In the MSA analysis, the untilted-particle projections were used as active, the tilted-particle projections as inactive objects. Upon tilting, those particles whose rocking axes are parallel to the tilt axis will change their appearance in the same way as under the influence of rocking. Therefore, each vector, in factor space, joining a tilted and untilted projection of the same particle can be regarded as a local 20-degree calibration bar.


Author(s):  
S. P. Eron’ko ◽  
M. Yu. Tkachev ◽  
E. V. Oshovskaya ◽  
B. I. Starodubtsev ◽  
S. V. Mechik

Effective application of slag-forming mixtures (SFM), being fed into continuous castingg machine (CCM) moulds, depends on their even distribution on the melt surface. Manual feeding of the SFM which is widely usedd does not provide this condition, resulting in the necessity to actualize the work to elaborate systems of SFM mechanized feedingg into moulds of various types CCM. A concept of the designing of a system of SFM feeding into CCM moulds presented with the ratte strictly correspondent to the casting speed and providing formation of an even layer of fine material of given thickness on the whoole surface of liquid steel. The proposed methods of designing of the SFM mechanized feeding systems based on three-dimensional computer simulation with the subsequent verification of the correctness of the adopted technical solutions on field samples. Informattion is presented on the design features of the adjusted facilities intended for continuous supply of finely granulated and powder mixtuures on metal mirror in moulds at the production of high-quality billets, blooms and slabs. Variants of mechanical and pneumo-mechaanical SFM supply elaborated. At the mechanical supply the fine material from the feeding hopper is moved at a adjusted distance bby a rigid horizontally located screw. At the pneumo-mechanical supply the metered doze of the granular mixture is delivered by a sshort vertical screw, the lower part of which is located in the mixing chamber attached from below to the hopper and equipped with ann ejector serving for pneumatic supply of the SFM in a stream of transporting gas. It was proposed to use flexible spiral screws in the ffuture facilities of mechanical SFM feeding. It will enable to eliminate the restrictions stipulated by the lack of free surface for locatiion of the facility in the working zone of the tundish, as well as to decrease significantly the mass of its movable part and to decreaase the necessary power of the carriage moving mechanism driver. The novelty of the proposed technical solutions is protected by thhree patents. The reduction of 10–15% in the consumption of slag-forming mixtures during the transition from manual to mechanizeed feeding confirmed. The resulting economic effect from the implementation of technical development enables to recoup the costs inncurred within 8–10 months.


2013 ◽  
Vol E96.C (5) ◽  
pp. 714-717
Author(s):  
Woo Young CHOI ◽  
Min Su HAN ◽  
Boram HAN ◽  
Dongsun SEO ◽  
Il Hwan CHO

2020 ◽  
Author(s):  
Soumi Haldar ◽  
Achintya Kumar Dutta

We have presented a multi-layer implementation of the equation of motion coupled-cluster method for the electron affinity, based on local and pair natural orbitals. The method gives consistent accuracy for both localized and delocalized anionic states. It results in many fold speedup in computational timing as compared to the canonical and DLPNO based implementation of the EA-EOM-CCSD method. We have also developed an explicit fragment-based approach which can lead to even higher speed-up with little loss in accuracy. The multi-layer method can be used to treat the environmental effect of both bonded and non-bonded nature on the electron attachment process in large molecules.<br>


Author(s):  
P. Perdu ◽  
G. Perez ◽  
M. Dupire ◽  
B. Benteo

Abstract To debug ASIC we likely use accurate tools such as an electron beam tester (Ebeam tester) and a Focused Ion Beam (FIB). Interactions between ions or electrons and the target device build charge up on its upper glassivation layer. This charge up could trigger several problems. With Ebeam testing, it sharply decreases voltage contrast during Image Fault Analysis and hide static voltage contrast. During ASIC reconfiguration with FIB, it could induce damages in the glassivation layer. Sample preparation is getting a key issue and we show how we can deal with it by optimizing carbon coating of the devices. Coating is done by an evaporator. For focused ion beam reconfiguration, we need a very thick coating. Otherwise the coating could be sputtered away due to imaging. This coating is use either to avoid charge-up on glassivated devices or as a sacrificial layer to avoid short circuits on unglassivated devices. For electron beam Testing, we need a very thin coating, we are now using an electrical characterization method with an insitu control system to obtain the right thin thickness. Carbon coating is a very cheap and useful method for sample preparation. It needs to be tuned according to the tool used.


1999 ◽  
Author(s):  
S. J. Yakura ◽  
David Dietz ◽  
Andy Greenwood ◽  
Ernest Baca

Nano Research ◽  
2021 ◽  
Author(s):  
Emma N. Welbourne ◽  
Tarun Vemulkar ◽  
Russell P. Cowburn

AbstractSynthetic antiferromagnetic (SAF) particles with perpendicular anisotropy display a number of desirable characteristics for applications in biological and other fluid environments. We present an efficient and effective method for the patterning of ultrathin Ruderman-Kittel-Kasuya-Yoshida coupled, perpendicularly magnetised SAFs using a combination of nanosphere lithography and ion milling. A Ge sacrificial layer is utilised, which provides a clean and simple lift-off process, as well as maintaining the key magnetic properties that are beneficial to target applications. We demonstrate that the method is capable of producing a particularly high yield of well-defined, thin film based nanoparticles.


Author(s):  
Youchao Xie ◽  
Wenbin Shen ◽  
Jiancheng Han ◽  
Xiaole Deng

Micromachines ◽  
2021 ◽  
Vol 12 (8) ◽  
pp. 892
Author(s):  
Jicong Zhao ◽  
Zheng Zhu ◽  
Haiyan Sun ◽  
Shitao Lv ◽  
Xingyu Wang ◽  
...  

This paper presents a micro-electro-mechanical systems (MEMS) processing technology for Aluminum Nitride (AlN) Lamb-wave resonators (LWRs). Two LWRs with different frequencies of 402.1 MHz and 2.097 GHz by varying the top interdigitated (IDT) periods were designed and fabricated. To avoid the shortcomings of the uncontrollable etching of inactive areas during the releasing process and to improve the fabrication yield, a thermal oxide layer was employed below the platted polysilicon sacrificial layer, which could define the miniaturized release cavities well. In addition, the bottom Mo electrode that was manufactured had a gentle inclination angle, which could contribute to the growth of the high-quality AlN piezoelectric layer above the Mo layer and effectively prevent the device from breaking. The measured results show that the IDT-floating resonators with 12 μm and 2 μm electrode periods exhibit a motional quality factor (Qm) as high as 4382 and 1633. The series resonant frequency (fs)·Qm values can reach as high as 1.76 × 1012 and 3.42 × 1012, respectively. Furthermore, Al is more suitable as the top IDT material of the AlN LWRs than Au, and can contribute to achieving an excellent electrical performances due to the smaller density, smaller thermo-elastic damping (TED), and larger acoustic impedance difference between Al and AlN.


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