Role of substrate temperature on the structural, optoelectronic and morphological properties of (400) oriented indium tin oxide thin films deposited using RF sputtering technique

2010 ◽  
Vol 21 (12) ◽  
pp. 1299-1307 ◽  
Author(s):  
V. Malathy ◽  
S. Sivaranjani ◽  
V. S. Vidhya ◽  
T. Balasubramanian ◽  
J. Joseph Prince ◽  
...  
Keyword(s):  
Thin Films ◽  
Substrate Temperature ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Rf Sputtering ◽  
Morphological Properties ◽  
Oxide Thin Films

Pulsed Laser Deposition of Low-Resistivity Indium Tin Oxide Thin Films at Low Substrate Temperature

1999 ◽  
Vol 38 (Part 1, No. 5A) ◽  
pp. 2710-2716 ◽  
Author(s):  
Frederick Ojo Adurodija ◽  
Hirokazu Izumi ◽  
Tsuguo Ishihara ◽  
Hideki Yoshioka ◽  
Hiroshi Matsui ◽  
...  
Keyword(s):  
Thin Films ◽  
Substrate Temperature ◽  
Pulsed Laser Deposition ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Oxide Thin Films ◽  
Low Resistivity

Influences of Sputtering Power and Substrate Temperature on the Properties of RF Magnetron Sputtered Indium Tin Oxide Thin Films

1999 ◽  
Vol 38 (Part 1, No. 6A) ◽  
pp. 3448-3452 ◽  
Author(s):  
E. Terzini ◽  
G. Nobile ◽  
S. Loreti ◽  
C. Minarini ◽  
T. Polichetti ◽  
...  
Keyword(s):  
Thin Films ◽  
Substrate Temperature ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Thin Films ◽  
Sputtering Power

scholarly journals Reduction of surface plasma loss of indium tin oxide thin films by regulating substrate temperature

2018 ◽  
Vol 67 (18) ◽  
pp. 180201
Author(s):  
Cai Xin-Yang ◽  
Wang Xin-Wei ◽  
Zhang Yu-Ping ◽  
Wang Deng-Kui ◽  
Fang Xuan ◽  
...  
Keyword(s):  
Thin Films ◽  
Substrate Temperature ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Surface Plasma ◽  
Oxide Thin Films ◽  
Plasma Loss

Phase separation in nanocomposite indium tin oxide thin films grown at room temperature: on the role of oxygen deficiency

2012 ◽  
Vol 22 (24) ◽  
pp. 12179 ◽  
Author(s):  
Eric Millon ◽  
Magdalena Nistor ◽  
Christian Hebert ◽  
Yohely Davila ◽  
Jacques Perrière
Keyword(s):  
Thin Films ◽  
Phase Separation ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Room Temperature ◽  
Oxygen Deficiency ◽  
Oxide Thin Films
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