Influence of Substrate Temperature on Properties of Indium Tin Oxide Thin Films Prepared by DC Magnetron Sputtering

2019 ◽  
Vol 44 (1) ◽  
pp. 1311-1316 ◽  
Author(s):  
Juan Xu ◽  
Yujie Yuan ◽  
Fang Wang ◽  
Kailiang Zhang
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Substrate Temperature ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Dc Magnetron Sputtering ◽  
Oxide Thin Films ◽  
Influence Of Substrate

Photoelectrochemical properties of nitrogen-doped indium tin oxide thin films prepared by reactive DC magnetron sputtering

2009 ◽  
Vol 518 (5) ◽  
pp. 1581-1584 ◽  
Author(s):  
Kee-Rong Wu ◽  
Chung-Wei Yeh ◽  
Chung-Hsuang Hung ◽  
Li-Hsun Cheng ◽  
Chih-Yuan Chung
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Photoelectrochemical Properties ◽  
Dc Magnetron Sputtering ◽  
Oxide Thin Films ◽  
Nitrogen Doped

Influence of Substrate Temperature and O2 Flow on the Properties of RF-Magnetron-Sputtered Indium-Tin-Oxide Thin Films

2007 ◽  
Vol 51 (2) ◽  
pp. 534-538 ◽  
Author(s):  
T. S. Kim ◽  
C. H. Choi ◽  
T. S. Jeong ◽  
K. H. Shim
Keyword(s):  
Thin Films ◽  
Substrate Temperature ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Thin Films ◽  
Influence Of Substrate

Influence of dc magnetron sputtering parameters on surface morphology of indium tin oxide thin films

2004 ◽  
Vol 221 (1-4) ◽  
pp. 136-142 ◽  
Author(s):  
Yeon Sik Jung ◽  
Dong Wook Lee ◽  
Duk Young Jeon
Keyword(s):  
Thin Films ◽  
Surface Morphology ◽  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Dc Magnetron Sputtering ◽  
Oxide Thin Films

The growth of indium-tin-oxide thin films on glass substrates using DC reactive magnetron sputtering

Vacuum ◽  
2003 ◽  
Vol 72 (3) ◽  
pp. 269-276 ◽  
Author(s):  
Ho-Chul Lee ◽  
Ji-Yoon Seo ◽  
Yong-Won Choi ◽  
Dong-Wook Lee
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Oxide Thin Films ◽  
Glass Substrates ◽  
Dc Reactive Magnetron Sputtering

Pulsed Laser Deposition of Low-Resistivity Indium Tin Oxide Thin Films at Low Substrate Temperature

1999 ◽  
Vol 38 (Part 1, No. 5A) ◽  
pp. 2710-2716 ◽  
Author(s):  
Frederick Ojo Adurodija ◽  
Hirokazu Izumi ◽  
Tsuguo Ishihara ◽  
Hideki Yoshioka ◽  
Hiroshi Matsui ◽  
...  
Keyword(s):  
Thin Films ◽  
Substrate Temperature ◽  
Pulsed Laser Deposition ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Oxide Thin Films ◽  
Low Resistivity

Influences of Sputtering Power and Substrate Temperature on the Properties of RF Magnetron Sputtered Indium Tin Oxide Thin Films

1999 ◽  
Vol 38 (Part 1, No. 6A) ◽  
pp. 3448-3452 ◽  
Author(s):  
E. Terzini ◽  
G. Nobile ◽  
S. Loreti ◽  
C. Minarini ◽  
T. Polichetti ◽  
...  
Keyword(s):  
Thin Films ◽  
Substrate Temperature ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Thin Films ◽  
Sputtering Power
Sign in / Sign up

Export Citation Format

Share Document