Study of the Properties of High-Sensitivity Thermally-Stable Thin-Film Resistance Strain Gauges for Integral Pressure Sensors

2016 ◽  
Vol 59 (1) ◽  
pp. 80-86 ◽  
Author(s):  
I. V. Volokhov ◽  
S. A. Gurin ◽  
I. R. Vergazov
Keyword(s):  
Thin Film ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Resistance Strain ◽  
Strain Gauges ◽  
Film Resistance ◽  
Thermally Stable

Development Of PVDF Thick Film Interdigitated Capacitors For Pressure Measurement On Flexible Melinex Substrates

2005 ◽  
Vol 870 ◽  
Author(s):  
Arous Arshak ◽  
Khalil Arshak ◽  
Deirdre Morris ◽  
Olga Korostynska ◽  
Essa Jafer
Keyword(s):  
Polymer Film ◽  
Thick Film ◽  
Pressure Measurement ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Strain Gauges ◽  
Interdigitated Electrodes ◽  
Higher Sensitivity

AbstractIn this work, a PVDF thick film paste was deposited onto interdigitated electrodes to form a capacitor. Two different substrates, alumina and Melinex® were used. Capacitors, fabricated on alumina substrates were tested as strain gauges, and showed a high sensitivity with low hysteresis. Capacitors on Melinex® substrates were tested as pressure sensors by adhering them to planar and cylindrical surfaces and subjecting them to pressures up to 300 kPa. Their sensitivity and hysteresis during cycling were examined and compared. It was found that sensors on cylindrical surfaces showed a higher sensitivity, however the hysteresis was also increased. It is thought that this is due to instabilities in the polymer film, accentuated by stretching of the substrate.

Sensitive Elements of High Temperature Pressure Sensors Formed from a Doped Polycrystalline Diamond

2021 ◽  
Vol 1031 ◽  
pp. 178-183
Author(s):  
Elena Vysotina ◽  
Razhudin Rizakhanov ◽  
Sergey Sigalaev ◽  
Nikolay Polushin ◽  
Vadim Shokorov ◽  
...  
Keyword(s):  
High Temperature ◽  
Diamond Film ◽  
Pressure Sensors ◽  
Polycrystalline Diamond ◽  
Resistance Strain ◽  
Promising Material ◽  
Strain Gauges ◽  
Extreme Conditions ◽  
Boron Doped ◽  
Polycrystalline Diamond Film

The need to create highly accurate pressure sensors that capable operate under extreme conditions in aviation, rocket and space equipment increases and becomes more relevant. The unique properties of diamond make it a promising material for microelectronic sensors. Sensitive elements of pressure sensors were developed where a resilient element is formed from silicon but resistance strain gauges are formed from a boron-doped polycrystalline diamond film.

Investigation on Strain Films in the Thin Film Resistance Strain Gauge

2008 ◽  
Vol 375-376 ◽  
pp. 690-694 ◽  
Author(s):  
Rong Fa Chen ◽  
Dun Wen Zuo ◽  
Yu Li Sun ◽  
Duo Sheng Li ◽  
Wen Zhuang Lu ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Strain Gauge ◽  
Alloy Film ◽  
Resistance Strain ◽  
Gauge Factor ◽  
Film Resistance ◽  
Resistance Strain Gauge ◽  
Order Of Magnitude ◽  
Post Deposition

Strain films in the thin film resistance strain gauge are prepared by magnetron sputtering method. Some results concerning the electromechanical and structural properties of nichrome (Ni80Cr20 wt.%) thin films are presented. As compared to the well-known Ni-Cu (constantan) alloy film, which are widely used for manufacturing pressure and force sensors, nichrome (Ni80Cr20 wt.%) thin films exhibit gauge factor values of the same order of magnitude, but they are much more corrosion resistant and adherent to the substrate. The influences of composition and post-deposition annealing on the electrical resistance, temperature coefficient of resistance (TCR) and gauge factor of nichrome (Ni80Cr20 wt.%) thin films are discussed.

An Approach on the Use of Co-Sputtered W-DLC Thin Films as Piezoresistive Sensing Materials

2021 ◽  
Vol 14 ◽  
Author(s):  
Gabriela Leal ◽  
Humber Furlan ◽  
Marcos Massi ◽  
Mariana Amorim Fraga
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Synthesis Method ◽  
Pressure Sensors ◽  
Strain Gauges ◽  
Gauge Factor ◽  
Diamond Like Carbon ◽  
Piezoresistive Sensors ◽  
Thin Film Resistors ◽  
Lift Off

Background: Miniaturized piezoresistive sensors, particularly strain gauges, pressure sensors, and accelerometers, have been used for measurements and control applications in various fields, such as automotive, aerospace, industrial, biomedical, sports, and many more. A variety of different materials have been investigated for the development of these sensors. Among them, diamond-like carbon (DLC) thin films have emerged as one of the most promising piezoresistive sensing materials due to their excellent mechanical properties, such as high hardness and high Young’s modulus. At the same time, metal doping has been studied to enhance its electrical properties. Objective: This article explores the use of co-sputtered tungsten-doped diamond-like carbon (W-DLC) thin films as microfabricated strain gauges or piezoresistors. Methods: Different serpentine thin-film resistors were microfabricated on co-sputtered W-DLC thin films using photolithography, metallization, lift-off, and RIE (reactive ion etching) processes. In order to evaluate their piezoresistive sensing performance, gauge factor (GF) measurements were carried out at room temperature using the cantilever beam method. Results: GF values obtained in this study for co-sputtered W-DLC thin films are comparable to those reported for W-DLC films produced and characterized by other techniques, which indicates the feasibility of our approach to use them as sensing materials in piezoresistive sensors. Conclusion: W-DLC thin films produced by the co-magnetron sputtering technique can be considered as sensing materials for miniaturized piezoresistive sensors due to the following key advantages: (i) easy and well-controlled synthesis method, (ii) good piezoresistive properties exhibiting a GF higher than metals, and (iii) thin-film resistors formed by a simple microfabrication process.

Study of Thin Film Pressure Sensor by Magnetron Sputtering

2015 ◽  
Vol 645-646 ◽  
pp. 566-571
Author(s):  
Dong Ping Hu ◽  
Xiao Long Wang
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Magnetron Sputtering ◽  
Small Volume ◽  
Dielectric Film ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Nicr Alloy ◽  
Film Pressure ◽  
Special Environment

The use of sensors made of thin films has several advantages over wire or foil sensors. Thin film pressure sensors can be used in high temperature, vibration and other special environment with small volume, high sensitivity and stability. Thin film pressure sensors can be made by magnetron sputtering. In this paper the thin film pressure sensors are prepared by elastic Element polishing, growth of dielectric film, NiCr alloy and Ni films with magnetron sputtering, the process and results are analyzed.

scholarly journals Silicon whisker pressure sensors for noise reduction in silencers

2021 ◽  
pp. 28-32
Author(s):  
A. A. Druzhinin ◽  
A. P. Kutrakov ◽  
R. V. Zinko
Keyword(s):  
Noise Suppression ◽  
Combustion Engine ◽  
Pressure Sensors ◽  
Low Frequency ◽  
High Sensitivity ◽  
Strain Gauges ◽  
Active System ◽  
Operating Modes ◽  
Noise Characteristics ◽  
Active Noise

The article contains the results of research and development of a system for active noise damping of an automobile engine. The main source of noise from a running engine is exhaust noise. The frequency spectrum of this sound has a pronounced low-frequency character, which explains its weak absorption when the sound is propagating in open spaces. A possible solution to this problem is to use an active system for suppressing the resonant frequencies of the muffler using strain gauges to read the primary information about the dynamic processes that determine the noise level. It is for such active noise suppression systems that the authors develop a high-temperature pressure sensor based on strain gauges made of silicon whiskers. Such strain gauges have unique mechanical properties, are characterized by high sensitivity and the ability to operate in various amplitude-frequency and temperature ranges up to 500℃. The study of the dynamic characteristics of pressure sensors made it possible to confirm the quality of its electromechanical part and determine that the measurement error of the sensor is ±0.5 in the temperature range of 20 to 500℃. The active noise suppression system is a buffer tank whose volume changes in accordance with signals from pressure sensors. This design makes it possible to dynamically change the resonant frequency of the buffer capacitance depending on the operating modes of the engine, which leads to a decrease in its noise characteristics. Using the developed additional resonator chamber with a variable volume in the exhaust muffler of an internal combustion engine made it possible to reduce resonance phenomena in the zone of low-frequency pulsations of the exhaust gas pressure from 57 to 43 Hz with a frequency drift in the range of 310 to 350 Hz, which significantly improved its noise characteristics.

Development of high sensitivity oxide based strain gauges and pressure sensors

2006 ◽  
Vol 17 (9) ◽  
pp. 767-778 ◽  
Author(s):  
K. Arshak ◽  
D. Morris ◽  
A. Arshak ◽  
O. Korostynska
Keyword(s):  
Pressure Sensors ◽  
High Sensitivity ◽  
Strain Gauges

NiC: a highly sensitive functional layer based on a nickel/graphene thin film for pressure and force sensors.

2015 ◽  
Vol 2015 (CICMT) ◽  
pp. 000208-000212
Author(s):  
Ralf Koppert
Keyword(s):  
Thin Film ◽  
High Performance ◽  
Pressure Range ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Gauge Factor ◽  
Force Sensors ◽  
Functional Layer ◽  
Voltage Range ◽  
Technical Effort

A functional layer based on nickel and graphene called NiC was developed with the goal of a high strain sensitivity in combination with an adjustable temperature coefficient of resistance (TCR). A gauge factor up to 30 and TCR values of approximately 0±25 ppm/K can be achieved by variation of the film composition. Based on the increased sensitivity the important pressure range of below 2.5 bar is opened up for steel membrane pressure sensors without the need of a sophisticated technical effort. First pressure and force sensors with NiC functional layers were realized in order to demonstrate the high performance of this new material. The enlarged sensitivity of the film leads to a complex re-development of the microsystems “pressure and force sensors” in order to take the advantage of the high linearity, low hysteresis, high overload protection and stability. Due to the high sensitivity, it is possible to produce sensors with significantly increased stability values in the overload region. Using the same output voltage range as usual with NiCr thin film elements, the overload capability of the sensors with the new functional layer is about twenty times the characteristic value of NiCr sensors. On the other hand, the low pressure range is opened up since the membrane needs to be deformed only one tenth of its usual value. Because of this low stress the load cycle stability increases accordingly. Additionally base body materials like 1.4435 (316L), which are not very suitable for the production of pressure sensor membranes, can be used for example for hydrogen applications.

High Sensitivity pH Sensors based on Amorphous Indium-gallium-zinc Oxide Thin-film Transistors

2015 ◽  
Vol 135 (6) ◽  
pp. 192-198 ◽  
Author(s):  
Shinnosuke Iwamatsu ◽  
Yutaka Abe ◽  
Toru Yahagi ◽  
Seiya Kobayashi ◽  
Kazushige Takechi ◽  
...  
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Thin Film Transistors ◽  
High Sensitivity ◽  
Oxide Thin Film ◽  
Indium Gallium Zinc Oxide ◽  
Ph Sensors ◽  
Zinc Oxide Thin Film ◽  
Indium Gallium
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