Analysis of Factors Affecting the Accuracy of Three-Dimensional Reconstruction of the Surface of Objects with Submicrometer Relief Obtained by Scanning Electron Microscope Stereo Images

2016 ◽  
Vol 59 (3) ◽  
pp. 230-234
Author(s):  
A. Yu. Kuzin ◽  
A. L. Vasil’ev ◽  
V. B. Mityukhlyaev ◽  
A. A. Mikhutkin ◽  
P. A. Todua ◽  
...  
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