scholarly journals Synthesis and device applications of high-density aligned carbon nanotubes using low-pressure chemical vapor deposition and stacked multiple transfer

Nano Research ◽  
2010 ◽  
Vol 3 (12) ◽  
pp. 831-842 ◽  
Author(s):  
Chuan Wang ◽  
Koungmin Ryu ◽  
Lewis Gomez De Arco ◽  
Alexander Badmaev ◽  
Jialu Zhang ◽  
...  
Keyword(s):  
Carbon Nanotubes ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
High Density ◽  
Aligned Carbon Nanotubes ◽  
Pressure Chemical ◽  
Device Applications

Low Pressure Chemical Vapor Deposition of Single-Wall Carbon Nanotubes

2006 ◽  
Vol 45 (No. 23) ◽  
pp. L605-L607 ◽  
Author(s):  
Takao Shiokawa ◽  
Bao-Ping Zhang ◽  
Masaki Suzuki ◽  
Koji Ishibashi
Keyword(s):  
Carbon Nanotubes ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Single Wall Carbon Nanotubes ◽  
Single Wall Carbon ◽  
Pressure Chemical

In Situ Phosphorus-Doped Poly-Si by Low Pressure Chemical Vapor Deposition for Passivating Contacts

2020 ◽  
Author(s):  
Meric Firat ◽  
Hariharsudan Sivaramakrishnan Radhakrishnan ◽  
Maria Recaman Payo ◽  
Filip Duerinckx ◽  
Rajiv Sharma ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Pressure Chemical ◽  
Phosphorus Doped

A Novel Direct Liquid Injection Low Pressure Chemical Vapor Deposition System (DLI-LPCVD) for the Deposition of Thin Films

2017 ◽  
Vol 19 (8) ◽  
pp. 1700193 ◽  
Author(s):  
Mattias Vervaele ◽  
Bert De Roo ◽  
Jolien Debehets ◽  
Marilyne Sousa ◽  
Luman Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Liquid Injection ◽  
Pressure Chemical ◽  
Direct Liquid Injection
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