scholarly journals SIMS of Organic Materials—Interface Location in Argon Gas Cluster Depth Profiles Using Negative Secondary Ions

2018 ◽  
Vol 29 (4) ◽  
pp. 774-785 ◽  
Author(s):  
R. Havelund ◽  
M. P. Seah ◽  
M. Tiddia ◽  
I. S. Gilmore
2014 ◽  
Vol 116 (5) ◽  
pp. 054908 ◽  
Author(s):  
Anders J. Barlow ◽  
Jose F. Portoles ◽  
Peter J. Cumpson

The Analyst ◽  
2015 ◽  
Vol 140 (17) ◽  
pp. 6005-6014 ◽  
Author(s):  
Adam J. Taylor ◽  
Daniel J. Graham ◽  
David G. Castner

This study describes new methods to transform and correct ToF-SIMS depth profiles of multilayer polymer films exhibiting differential sputter rates.


2015 ◽  
Vol 119 (42) ◽  
pp. 13433-13439 ◽  
Author(s):  
M. P. Seah ◽  
R. Havelund ◽  
A. G. Shard ◽  
I. S. Gilmore

2015 ◽  
Vol 119 (7) ◽  
pp. 3297-3303 ◽  
Author(s):  
M. P. Seah ◽  
S. J. Spencer ◽  
A. G. Shard

2007 ◽  
Vol 25 (3) ◽  
pp. 480-484 ◽  
Author(s):  
Shane E. Harton ◽  
Zhengmao Zhu ◽  
Frederick A. Stevie ◽  
Dieter P. Griffis ◽  
Harald Ade

Author(s):  
P.J. Killingworth ◽  
M. Warren

Ultimate resolution in the scanning electron microscope is determined not only by the diameter of the incident electron beam, but by interaction of that beam with the specimen material. Generally, while minimum beam diameter diminishes with increasing voltage, due to the reduced effect of aberration component and magnetic interference, the excited volume within the sample increases with electron energy. Thus, for any given material and imaging signal, there is an optimum volt age to achieve best resolution.In the case of organic materials, which are in general of low density and electric ally non-conducting; and may in addition be susceptible to radiation and heat damage, the selection of correct operating parameters is extremely critical and is achiev ed by interative adjustment.


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