Application of a quartz crystal thickness monitor in the continuous measurement of thickness of evaporated and sputtered metal films

1971 ◽  
Vol 10 (2) ◽  
pp. 131
2021 ◽  
Vol 92 (2) ◽  
pp. 023307
Author(s):  
M. Bertucci ◽  
A. Bosotti ◽  
R. Campari ◽  
A. D’Ambros ◽  
A. Gresele ◽  
...  

2007 ◽  
Vol 22 (7) ◽  
pp. 2012-2016 ◽  
Author(s):  
Hakkwan Kim ◽  
Alexander H. King

We have measured the porosity in thin films of lithium fluoride (LiF), magnesium fluoride (MgF2), barium fluoride (BaF2), and calcium fluoride (CaF2) as a function of the substrate temperature for films deposited by thermal evaporation onto glass substrates. The amount of porosity in the thin films was measured using an atomic force microscope and a quartz crystal thickness monitor. The porosity was very sensitive to the substrate temperature and decreased as the substrate temperature increased. Consistent behavior was observed among all of the materials in this study.


1999 ◽  
Vol 7 (3) ◽  
pp. 27-27
Author(s):  
Alwyn Eades

There are two approaches to determining the thickness of a carbon film evaporated onto a specimen. One approach is to do the evaporation first and to measure the result afterwards. There are several ways to do this. The second approach is to put down a determined amount of carbon in the first place. This clearly has advantages in many cases. The method described here is of this second kind. The thickness of the carbon coating is not measured, but by a predetermined recipe, the amount put on is controlled at the time of evaporation, In principle, the thickness could be measured during the evaporation with a quartz-crystal thickness monitor. However, we find that the monitor we have does not work well with carbon.


2007 ◽  
Vol 78 (8) ◽  
pp. 083110 ◽  
Author(s):  
J. Forsberg ◽  
L.-C. Duda ◽  
A. Olsson ◽  
T. Schmitt ◽  
J. Andersson ◽  
...  

Vacuum ◽  
1996 ◽  
Vol 47 (1) ◽  
pp. 87-89 ◽  
Author(s):  
L Shivalingappa ◽  
MP Srinivasan ◽  
S Mohan

1999 ◽  
Vol 32 (2) ◽  
pp. 154-159 ◽  
Author(s):  
V. Mocella ◽  
Y. Epelboin

This paper analyses the contrast of white-beam stroboscopic synchrotron topographs of Rayleigh waves induced by a piezoelectric transducer in an α-quartz crystal. The aim of the present investigation is to study the influence of the crystal thickness and of the vibration amplitude on the image contrast. A periodic optimal thickness is found that maximizes the film contrast.


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