Application of a quartz crystal thickness monitor in the continuous measurement of thickness of evaporated and sputtered metal films
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2007 ◽
Vol 22
(7)
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pp. 2012-2016
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2007 ◽
Vol 78
(8)
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pp. 083110
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1999 ◽
Vol 32
(2)
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pp. 154-159
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