Thin film integrated RC-networks with compensated temperature coefficients of R and C

1978 ◽  
Vol 17 (4) ◽  
pp. 427
Keyword(s):  
Thin Film ◽  
Temperature Coefficients ◽  
Rc Networks

scholarly journals Thin Film Integrated RC-Networks With Compensated Temperature Coefficients of R and C

1977 ◽  
Vol 4 (3-4) ◽  
pp. 139-142 ◽  
Author(s):  
H. W. Pötzlberger
Keyword(s):  
Thin Film ◽  
Dielectric Loss ◽  
Temperature Coefficient ◽  
Wide Temperature Range ◽  
Temperature Compensation ◽  
Capacitance Density ◽  
Temperature Range ◽  
Temperature Coefficients ◽  
Capacitor Structure ◽  
Rc Networks

Thin film integrated RC-networks can be prepared from two non reactively sputtered TaAl films, the properties and optimum compositions of which have been found. Temperature compensation of the integrated resistors and capacitors is achieved by adjusting the temperature coefficient of capacitance. A duplex dielectric capacitor structure is used with anodically formed TaAl-oxide and a sputtered SiO2layer. Temperature coefficient of capacitance, dielectric loss and capacitance density have been measured vs. SiO2thickness. Because of almost linear dependences on temperature of both the TaAl resistors and the TaAl-oxide/SiO2-capacitors, such RC-networks show temperature compensation over a wide temperature range, the TCC being +110 ppm/K and the TCR −110 ppm/K.

scholarly journals A Study on Selectivity and Temperature Coefficients of the Chloride Ion Sensors With RuOx Thin Film

2019 ◽  
Vol 7 ◽  
pp. 140-149 ◽  
Author(s):  
Shi-Chang Tseng ◽  
Tong-Yu Wu ◽  
Jung-Chuan Chou ◽  
Yi-Hung Liao ◽  
Chih-Hsien Lai ◽  
...  
Keyword(s):  
Thin Film ◽  
Chloride Ion ◽  
Ion Sensors ◽  
Temperature Coefficients

Determination of temperature coefficients of thin film materials in RF BAW components

2015 ◽  
Author(s):  
A. Tag ◽  
R. Weigel ◽  
A. Hagelauer ◽  
B. Bader ◽  
M. Pitschi ◽  
...  
Keyword(s):  
Thin Film ◽  
Temperature Coefficients
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