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Low temperature metal-organic chemical vapor deposition of aluminum nitride with nitrogen trifluoride as the nitrogen source
Thin Solid Films
◽
10.1016/0040-6090(90)90469-t
◽
1990
◽
Vol 189
(2)
◽
pp. L11-L14
◽
Cited By ~ 11
Author(s):
J.H. Edgar
◽
Z.J. Yu
◽
A.U. Ahmed
◽
A. Rys
Keyword(s):
Chemical Vapor Deposition
◽
Low Temperature
◽
Aluminum Nitride
◽
Nitrogen Source
◽
Vapor Deposition
◽
Chemical Vapor
◽
Organic Chemical
◽
Nitrogen Trifluoride
◽
Metal Organic
◽
Organic Chemical Vapor Deposition
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References
Transparent conducting indium oxide thin films grown by low-temperature metal organic chemical vapor deposition
Thin Solid Films
◽
10.1016/j.tsf.2006.08.030
◽
2007
◽
Vol 515
(5)
◽
pp. 2921-2925
◽
Cited By ~ 27
Author(s):
Chunyu Wang
◽
Volker Cimalla
◽
Genady Cherkashinin
◽
Henry Romanus
◽
Majdeddin Ali
◽
...
Keyword(s):
Thin Films
◽
Chemical Vapor Deposition
◽
Low Temperature
◽
Indium Oxide
◽
Vapor Deposition
◽
Chemical Vapor
◽
Organic Chemical
◽
Transparent Conducting
◽
Metal Organic
◽
Organic Chemical Vapor Deposition
Download Full-text
Metal-organic chemical vapor deposition of quasi-normally-off AlGaN/GaN field-effect transistors on silicon substrates using low-temperature grown AlN cap layers
Applied Physics Letters
◽
10.1063/1.3475394
◽
2010
◽
Vol 97
(5)
◽
pp. 053502
◽
Cited By ~ 6
Author(s):
S. Tan
◽
S. L. Selvaraj
◽
T. Egawa
Keyword(s):
Chemical Vapor Deposition
◽
Low Temperature
◽
Vapor Deposition
◽
Field Effect
◽
Field Effect Transistors
◽
Chemical Vapor
◽
Organic Chemical
◽
Silicon Substrates
◽
Metal Organic
◽
Organic Chemical Vapor Deposition
Download Full-text
ChemInform Abstract: Some Properties of Aluminum-Nitride Powder Prepared by Metal-Organic Chemical Vapor Deposition.
ChemInform
◽
10.1002/chin.199545030
◽
2010
◽
Vol 26
(45)
◽
pp. no-no
Author(s):
K. KUBO
◽
K. ITATANI
◽
F. S. HOWELL
◽
A. KISHIOKA
◽
M. KINOSHITA
Keyword(s):
Chemical Vapor Deposition
◽
Aluminum Nitride
◽
Vapor Deposition
◽
Chemical Vapor
◽
Organic Chemical
◽
Nitride Powder
◽
Metal Organic
◽
Organic Chemical Vapor Deposition
Download Full-text
Low-Temperature and High-Quality Growth of Bi2O2Se Layered Semiconductors via Cracking Metal–Organic Chemical Vapor Deposition
ACS Nano
◽
10.1021/acsnano.1c00811
◽
2021
◽
Author(s):
Minsoo Kang
◽
Hyun-Jun Chai
◽
Han Beom Jeong
◽
Cheolmin Park
◽
In-young Jung
◽
...
Keyword(s):
Chemical Vapor Deposition
◽
Low Temperature
◽
Vapor Deposition
◽
Chemical Vapor
◽
Organic Chemical
◽
High Quality
◽
Layered Semiconductors
◽
Metal Organic
◽
Organic Chemical Vapor Deposition
Download Full-text
S/Mo ratio and petal size controlled MoS2 nanoflowers with low temperature metal organic chemical vapor deposition and their application in solar cells
Nanotechnology
◽
10.1088/1361-6528/abe32c
◽
2021
◽
Vol 32
(19)
◽
pp. 195206
Author(s):
Jaeseo Park
◽
Hyeji Park
◽
Suho Park
◽
Nguyen Thi Thuy
◽
Jihun Mun
◽
...
Keyword(s):
Solar Cells
◽
Chemical Vapor Deposition
◽
Low Temperature
◽
Vapor Deposition
◽
Chemical Vapor
◽
Organic Chemical
◽
Metal Organic
◽
Organic Chemical Vapor Deposition
◽
Petal Size
◽
Size Controlled
Download Full-text
Low temperature metal-organic chemical vapor deposition of tungsten nitride as diffusion barrier for copper metallization
Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena
◽
10.1116/1.590703
◽
1999
◽
Vol 17
(3)
◽
pp. 1101
◽
Cited By ~ 41
Author(s):
Jean E. Kelsey
◽
Cindy Goldberg
◽
Guillermo Nuesca
◽
Gregory Peterson
◽
Alain E. Kaloyeros
◽
...
Keyword(s):
Chemical Vapor Deposition
◽
Low Temperature
◽
Diffusion Barrier
◽
Vapor Deposition
◽
Chemical Vapor
◽
Copper Metallization
◽
Organic Chemical
◽
Tungsten Nitride
◽
Metal Organic
◽
Organic Chemical Vapor Deposition
Download Full-text
Low temperature metal-organic chemical vapor deposition of advanced barrier layers for the microelectronics industry
Thin Solid Films
◽
10.1016/0040-6090(94)90479-0
◽
1994
◽
Vol 247
(1)
◽
pp. 85-93
◽
Cited By ~ 55
Author(s):
Ivo J. Raaijmakers
Keyword(s):
Chemical Vapor Deposition
◽
Low Temperature
◽
Vapor Deposition
◽
Chemical Vapor
◽
Organic Chemical
◽
Barrier Layers
◽
Metal Organic
◽
Microelectronics Industry
◽
Organic Chemical Vapor Deposition
Download Full-text
Structural properties of titanium dioxide films grown on p-Si by metal-organic chemical vapor deposition at low temperature
Thin Solid Films
◽
10.1016/0040-6090(94)90640-8
◽
1994
◽
Vol 238
(1)
◽
pp. 12-14
◽
Cited By ~ 10
Author(s):
Y.S. Yoon
◽
W.N. Kang
◽
S.S. Yom
◽
T.W. Kim
◽
M. Jung
◽
...
Keyword(s):
Titanium Dioxide
◽
Chemical Vapor Deposition
◽
Low Temperature
◽
Structural Properties
◽
Vapor Deposition
◽
Chemical Vapor
◽
Organic Chemical
◽
Titanium Dioxide Films
◽
Metal Organic
◽
Organic Chemical Vapor Deposition
Download Full-text
Low-temperature atmospheric-pressure metal-organic chemical vapor deposition of molybdenum nitride thin films
Thin Solid Films
◽
10.1016/s0040-6090(96)08867-0
◽
1996
◽
Vol 288
(1-2)
◽
pp. 116-119
◽
Cited By ~ 28
Author(s):
Renaud Fix
◽
Roy G. Gordon
◽
David M. Hoffman
Keyword(s):
Thin Films
◽
Chemical Vapor Deposition
◽
Low Temperature
◽
Vapor Deposition
◽
Atmospheric Pressure
◽
Chemical Vapor
◽
Organic Chemical
◽
Molybdenum Nitride
◽
Metal Organic
◽
Organic Chemical Vapor Deposition
Download Full-text
ChemInform Abstract: Electrochemical Characteristics of Amorphous Titanium Carbide Films Produced by Low-Temperature Metal-Organic Chemical Vapor Deposition (MOCVD).
ChemInform
◽
10.1002/chin.198815380
◽
1988
◽
Vol 19
(15)
◽
Author(s):
C. M. ALLOCA
◽
W. S. WILLIAMS
◽
A. E. KALOYEROS
Keyword(s):
Chemical Vapor Deposition
◽
Low Temperature
◽
Titanium Carbide
◽
Vapor Deposition
◽
Chemical Vapor
◽
Organic Chemical
◽
Electrochemical Characteristics
◽
Metal Organic
◽
Organic Chemical Vapor Deposition
Download Full-text
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